Onto Innovation (ONTO) Share-based Compensation (2011 - 2026)

Onto Innovation (ONTO) recorded quarterly Share-based Compensation of $7.0 million in Q1 2026, down 53.35% on a QoQ basis from $15.0 million in Q1 2026, and down 19.27% YoY from $8.7 million in Q1 2025.

Onto Innovation (ONTO) Share-based Compensation (2011 - 2026) Analysis & Trends

Onto Innovation (ONTO) has reported Share-based Compensation for 16 consecutive years, with $7.0 million the latest figure, recorded in Q1 2026.

  • Share-based Compensation for Q1 2026 came in at $7.0 million, down 19.27% year-over-year; the trailing twelve-month figure through Mar 2026 was $27.6 million (up 68.47% YoY), and the FY2026 annual result was $37.2 million, up 27.4% from the prior year.
  • Share-based Compensation for Q1 2026 stood at $7.0 million, down from $15.0 million in the prior quarter.
  • The five-year high for Share-based Compensation was $33.3 million in Q4 2022, with the low at -$10.1 million in Q4 2022.
  • A 5-year average of $9.1 million and a median of $5.9 million in 2023 frame the typical range for Share-based Compensation.
  • Across the five-year window, Share-based Compensation tumbled 147.84% in 2022 and surged 101883.33% in 2023, its largest moves.
  • Onto Innovation's Share-based Compensation stood at -$10.1 million in 2022, then jumped by 155.69% to $5.6 million in 2023, then sank by 89.21% to $604000.0 in 2024, then soared by 820.7% to $5.6 million in 2025, then increased by 26.07% to $7.0 million in 2026.
  • The last three Share-based Compensation figures came in at $7.0 million (Q1 2026), $15.0 million (Q1 2026), and $5.6 million (Q3 2025), per Business Quant data.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) Share-based Compensation (Qtr)
1 Asml Holding 636.08 Bn 620.57 Bn 5.90 Bn -
2 Applied Materials 406.04 Bn 399.30 Bn 3.95 Bn 102.00 Mn
3 Lam Research 369.24 Bn 364.49 Bn 2.91 Bn 96.62 Mn
4 Kla 240.65 Bn 238.86 Bn 2.09 Bn -52.93 Mn
5 Teradyne 58.07 Bn 57.82 Bn 780.95 Mn 21.90 Mn
6 Qnity Electronics 27.70 Bn 26.85 Bn 618.00 Mn 10.00 Mn
7 Entegris 18.25 Bn 17.80 Bn 380.80 Mn 10.10 Mn
8 Onto Innovation 12.83 Bn 12.17 Bn 146.39 Mn 7.01 Mn
9 Amkor Technology 12.41 Bn 9.90 Bn 318.59 Mn -
10 Formfactor 8.32 Bn 8.14 Bn 86.79 Mn 6.75 Mn

Historic Data

Download Data
DateValue
Mar 31, 2026 7.01 Mn
Mar 31, 2026 7.01 Mn
Jan 3, 2026 15.03 Mn
Jan 3, 2026 15.03 Mn
Sep 27, 2025 5.56 Mn
Sep 27, 2025 5.56 Mn
Mar 29, 2025 8.68 Mn
Mar 29, 2025 8.68 Mn
Dec 28, 2024 604,000.00
Dec 28, 2024 604,000.00
Sep 28, 2024 7.10 Mn
Sep 28, 2024 7.10 Mn
Mar 30, 2024 4.02 Mn
Mar 30, 2024 4.02 Mn
Dec 30, 2023 5.60 Mn
Dec 30, 2023 5.60 Mn
Sep 30, 2023 32.57 Mn
Sep 30, 2023 32.57 Mn
Jul 1, 2023 5.29 Mn
Jul 1, 2023 5.29 Mn