Onto Innovation (ONTO) Share-based Compensation (2011 - 2026)

Onto Innovation (ONTO) recorded quarterly Share-based Compensation of $7.0 million in Q1 2026, down 3.15% quarter-over-quarter from $7.2 million in Q1 2026, and up 2.89% on a YoY basis from $6.8 million in Q1 2025.

Onto Innovation (ONTO) Share-based Compensation (2011 - 2026) Analysis & Trends

Onto Innovation's Share-based Compensation history runs 16 years deep, the most recent figure standing at $7.0 million for Q1 2026.

  • In Q1 2026, Share-based Compensation rose 2.89% year-over-year to $7.0 million; the TTM figure through Mar 2026 stood at $27.8 million (down 3.77% YoY), while the FY2026 annual figure was $27.6 million, down 3.36% from the prior year.
  • Share-based Compensation was $7.0 million for Q1 2026 at Onto Innovation, down from $7.2 million in the prior quarter.
  • In the past five years, Share-based Compensation ranged from a high of $8.2 million in Q2 2024 to a low of $4.8 million in Q2 2022.
  • Historically, Share-based Compensation has averaged $6.7 million across 5 years, with a median of $6.8 million in 2024.
  • The sharpest annual moves came in 2023 and 2025: Share-based Compensation rose 26.63% in 2023, then retreated 19.0% in 2025.
  • A 5-year view of Share-based Compensation shows it stood at $5.5 million in 2022, then increased by 1.87% to $5.6 million in 2023, then advanced by 20.55% to $6.8 million in 2024, then grew by 2.01% to $6.9 million in 2025, then gained by 1.8% to $7.0 million in 2026.
  • The last three Share-based Compensation figures came in at $7.0 million (Q1 2026), $7.2 million (Q1 2026), and $6.9 million (Q3 2025), per Business Quant data.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) Share-based Compensation (Qtr)
1 Asml Holding 14,996,080.76 Bn 14,996,065.25 Bn 5.90 Bn -
2 Lam Research 409.52 Bn 404.77 Bn 2.91 Bn 96.62 Mn
3 Applied Materials 389.06 Bn 382.32 Bn 3.95 Bn 169.00 Mn
4 Kla 280.01 Bn 275.05 Bn 2.09 Bn 83.94 Mn
5 Teradyne 57.58 Bn 57.34 Bn 780.95 Mn 21.90 Mn
6 Qnity Electronics 30.30 Bn 30.47 Bn 618.00 Mn 10.00 Mn
7 Entegris 20.39 Bn 19.94 Bn 380.80 Mn 16.70 Mn
8 Amkor Technology 17.53 Bn 15.72 Bn 239.03 Mn -
9 Onto Innovation 13.62 Bn 12.97 Bn 146.39 Mn 7.01 Mn
10 Formfactor 9.34 Bn 9.04 Bn 86.79 Mn 8.06 Mn

Historic Data

Download Data
DateValue
Mar 31, 2026 7.01 Mn
Mar 31, 2026 7.01 Mn
Jan 3, 2026 7.24 Mn
Jan 3, 2026 7.24 Mn
Sep 27, 2025 6.89 Mn
Sep 27, 2025 6.89 Mn
Jun 28, 2025 6.68 Mn
Jun 28, 2025 6.68 Mn
Mar 29, 2025 6.81 Mn
Mar 29, 2025 6.81 Mn
Dec 28, 2024 6.75 Mn
Dec 28, 2024 6.75 Mn
Sep 28, 2024 7.10 Mn
Sep 28, 2024 7.10 Mn
Jun 29, 2024 8.24 Mn
Jun 29, 2024 8.24 Mn
Mar 30, 2024 6.49 Mn
Mar 30, 2024 6.49 Mn
Dec 30, 2023 5.60 Mn
Dec 30, 2023 5.60 Mn