Axcelis Technologies (ACLS) Share-based Compensation (2010 - 2026)

Axcelis Technologies (ACLS) posted Share-based Compensation of $4.9 million for Q1 2026, down 4.02% sequentially from $5.1 million in Q4 2025, and little changed on a YoY basis from $4.9 million in Q1 2025.

Axcelis Technologies (ACLS) Share-based Compensation (2010 - 2026) Analysis & Trends

Axcelis Technologies has disclosed Share-based Compensation across 17 years of filings, most recently posting $4.9 million for Q1 2026.

  • On a quarterly basis, Share-based Compensation changed 0.0% year-over-year to $4.9 million in Q1 2026; TTM through Mar 2026 was $20.7 million, a 2.47% decrease from a year earlier, with the FY2025 full-year figure at $43.7 million, up 18.11% from the prior year.
  • Share-based Compensation came in at $4.9 million for Q1 2026 at Axcelis Technologies, down from $5.1 million in the prior quarter.
  • Over five years, Share-based Compensation peaked at $5.5 million in Q2 2024 and troughed at $2.7 million in Q1 2022.
  • Historically, Share-based Compensation has averaged $4.6 million across 5 years, with a median of $4.9 million in 2025.
  • Year-over-year, Share-based Compensation soared 46.92% in 2024 and fell 5.97% in 2025.
  • Axcelis Technologies' Share-based Compensation stood at $3.6 million in 2022, then surged by 46.36% to $5.3 million in 2023, then climbed by 3.04% to $5.4 million in 2024, then fell by 5.97% to $5.1 million in 2025, then dropped by 4.02% to $4.9 million in 2026.
  • The last three Share-based Compensation figures came in at $4.9 million (Q1 2026), $5.1 million (Q4 2025), and $5.3 million (Q3 2025), per Business Quant data.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) Share-based Compensation (Qtr)
1 Asml Holding 636.08 Bn 620.57 Bn 5.90 Bn -
2 Applied Materials 406.04 Bn 399.30 Bn 3.95 Bn 102.00 Mn
3 Lam Research 369.24 Bn 364.49 Bn 2.91 Bn 96.62 Mn
4 Kla 240.65 Bn 238.86 Bn 2.09 Bn -52.93 Mn
5 Teradyne 58.07 Bn 57.82 Bn 780.95 Mn 21.90 Mn
6 Qnity Electronics 27.70 Bn 26.85 Bn 618.00 Mn 10.00 Mn
7 Entegris 18.25 Bn 17.80 Bn 380.80 Mn 10.10 Mn
8 Onto Innovation 12.83 Bn 12.17 Bn 146.39 Mn 7.01 Mn
9 Amkor Technology 12.41 Bn 9.90 Bn 318.59 Mn -
10 Axcelis Technologies 4.02 Bn 3.66 Bn 80.58 Mn 4.90 Mn

Historic Data

Download Data
DateValue
Mar 31, 2026 4.90 Mn
Mar 31, 2026 4.90 Mn
Dec 31, 2025 5.11 Mn
Dec 31, 2025 5.11 Mn
Sep 30, 2025 5.30 Mn
Sep 30, 2025 5.30 Mn
Jun 30, 2025 5.40 Mn
Jun 30, 2025 5.40 Mn
Mar 31, 2025 4.90 Mn
Mar 31, 2025 4.90 Mn
Dec 31, 2024 5.43 Mn
Dec 31, 2024 5.43 Mn
Sep 30, 2024 5.40 Mn
Sep 30, 2024 5.40 Mn
Jun 30, 2024 5.50 Mn
Jun 30, 2024 5.50 Mn
Mar 31, 2024 4.70 Mn
Mar 31, 2024 4.70 Mn
Dec 31, 2023 5.27 Mn
Dec 31, 2023 5.27 Mn