Onto Innovation (ONTO) Research & Development (2010 - 2026)

Onto Innovation (ONTO) recorded quarterly Research & Development of $35.1 million in Q1 2026, down 2.94% quarter-over-quarter from $36.2 million in Q1 2026, and up 25.22% on a YoY basis from $28.0 million in Q1 2025.

Onto Innovation (ONTO) Research & Development (2010 - 2026) Analysis & Trends

Onto Innovation's Research & Development history runs 17 years deep, the most recent figure standing at $35.1 million for Q1 2026.

  • In Q1 2026, Research & Development rose 25.22% year-over-year to $35.1 million; the TTM figure through Mar 2026 stood at $139.0 million (up 20.56% YoY), while the FY2026 annual figure was $132.0 million, up 15.91% from the prior year.
  • Research & Development was $35.1 million for Q1 2026 at Onto Innovation, down from $36.2 million in the prior quarter.
  • In the past five years, Research & Development ranged from a high of $36.2 million in Q1 2026 to a low of $24.0 million in Q4 2023.
  • Historically, Research & Development has averaged $29.3 million across 5 years, with a median of $27.8 million in 2022.
  • The sharpest annual moves came in 2022 and 2023: Research & Development jumped 35.02% in 2022, then retreated 18.71% in 2023.
  • A 5-year view of Research & Development shows it stood at $27.8 million in 2022, then decreased by 13.67% to $24.0 million in 2023, then surged by 33.15% to $32.0 million in 2024, then gained by 1.59% to $32.5 million in 2025, then gained by 8.02% to $35.1 million in 2026.
  • The last three Research & Development figures came in at $35.1 million (Q1 2026), $36.2 million (Q1 2026), and $32.5 million (Q3 2025), per Business Quant data.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) R&D (Qtr)
1 Asml Holding 14,963,355.55 Bn 14,963,340.04 Bn 5.90 Bn -
2 Lam Research 408.02 Bn 403.27 Bn 2.91 Bn 583.20 Mn
3 Applied Materials 391.00 Bn 384.25 Bn 3.95 Bn 1.03 Bn
4 Kla 277.01 Bn 272.05 Bn 2.09 Bn 388.76 Mn
5 Teradyne 58.18 Bn 57.94 Bn 780.95 Mn 135.56 Mn
6 Qnity Electronics 30.25 Bn 30.41 Bn 618.00 Mn 94.00 Mn
7 Entegris 20.20 Bn 19.76 Bn 380.80 Mn 75.30 Mn
8 Amkor Technology 16.87 Bn 15.05 Bn 239.03 Mn 41.76 Mn
9 Onto Innovation 13.38 Bn 12.72 Bn 146.39 Mn 35.10 Mn
10 Formfactor 9.68 Bn 9.38 Bn 86.79 Mn 30.78 Mn

Historic Data

Download Data
DateValue
Mar 31, 2026 35.10 Mn
Jan 3, 2026 36.16 Mn
Sep 27, 2025 32.49 Mn
Jun 28, 2025 35.29 Mn
Mar 29, 2025 28.03 Mn
Dec 28, 2024 31.98 Mn
Sep 28, 2024 28.28 Mn
Jun 29, 2024 27.04 Mn
Mar 30, 2024 26.55 Mn
Dec 30, 2023 24.02 Mn
Sep 30, 2023 26.14 Mn
Jul 1, 2023 27.04 Mn
Apr 1, 2023 27.24 Mn
Dec 31, 2022 27.83 Mn
Oct 1, 2022 32.15 Mn
Jul 2, 2022 25.64 Mn
Apr 2, 2022 26.34 Mn
Sep 25, 2021 23.81 Mn
Jun 26, 2021 25.51 Mn
Mar 27, 2021 21.96 Mn