Onto Innovation (ONTO) Research & Development (2010 - 2026)

Onto Innovation (ONTO) posted quarterly Research & Development of $35.1 million for Q1 2026, up 25.22% YoY from $28.0 million in Q1 2025, and down 2.94% sequentially from $36.2 million in Q1 2026.

Onto Innovation (ONTO) Research & Development (2010 - 2026) Analysis & Trends

Onto Innovation has disclosed Research & Development across 17 years of filings, most recently posting $35.1 million for Q1 2026.

  • In Q1 2026, Research & Development rose 25.22% year-over-year to $35.1 million; the TTM figure through Mar 2026 stood at $139.0 million (up 20.56% YoY), while the FY2026 annual figure was $132.0 million, up 15.91% from the prior year.
  • Research & Development declined to $35.1 million in Q1 2026, from $36.2 million in the prior quarter.
  • Over the last five years, Research & Development for ONTO reached as high as $36.2 million in Q1 2026 and fell as low as $24.0 million in Q4 2023.
  • The 5-year median for Research & Development is $27.8 million (2022), against an average of $29.3 million.
  • Annual changes were most pronounced in 2022 — Research & Development soared 35.02% — and 2023, when it fell 18.71%.
  • A 5-year view of Research & Development shows it stood at $27.8 million in 2022, then fell by 13.67% to $24.0 million in 2023, then soared by 33.15% to $32.0 million in 2024, then increased by 1.59% to $32.5 million in 2025, then increased by 8.02% to $35.1 million in 2026.
  • According to Business Quant data, Research & Development over the past three periods registered $35.1 million, $36.2 million, and $32.5 million for Q1 2026, Q1 2026, and Q3 2025 respectively.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) R&D (Qtr)
1 Applied Materials 516.82 Bn 510.08 Bn 3.95 Bn 1.03 Bn
2 Lam Research 488.97 Bn 484.22 Bn 2.91 Bn 583.20 Mn
3 Kla 348.47 Bn 343.51 Bn 2.09 Bn 388.76 Mn
4 Teradyne 66.84 Bn 66.60 Bn 780.95 Mn 135.56 Mn
5 Qnity Electronics 32.19 Bn 32.35 Bn 618.00 Mn 94.00 Mn
6 Entegris 25.16 Bn 24.72 Bn 380.80 Mn 75.30 Mn
7 Amkor Technology 19.80 Bn 17.99 Bn 239.03 Mn 41.76 Mn
8 Formfactor 11.45 Bn 11.15 Bn 86.79 Mn 30.78 Mn
9 ACM Research 7.71 Bn 7.32 Bn 107.24 Mn 36.55 Mn
10 Onto Innovation 17.59 Mn -636.57 Mn 146.39 Mn 35.10 Mn

Historic Data

Download Data
DateValue
Mar 31, 2026 35.10 Mn
Jan 3, 2026 36.16 Mn
Sep 27, 2025 32.49 Mn
Jun 28, 2025 35.29 Mn
Mar 29, 2025 28.03 Mn
Dec 28, 2024 31.98 Mn
Sep 28, 2024 28.28 Mn
Jun 29, 2024 27.04 Mn
Mar 30, 2024 26.55 Mn
Dec 30, 2023 24.02 Mn
Sep 30, 2023 26.14 Mn
Jul 1, 2023 27.04 Mn
Apr 1, 2023 27.24 Mn
Dec 31, 2022 27.83 Mn
Oct 1, 2022 32.15 Mn
Jul 2, 2022 25.64 Mn
Apr 2, 2022 26.34 Mn
Sep 25, 2021 23.81 Mn
Jun 26, 2021 25.51 Mn
Mar 27, 2021 21.96 Mn