Onto Innovation (ONTO) EBITDA Margin (2010 - 2026)

Onto Innovation (ONTO) recorded quarterly EBITDA Margin of 11.48% in Q1 2026, up 121.06% on a QoQ basis from 5.19% in Q1 2026, and down 1220.0% YoY from 1.02% in Q1 2025.

Onto Innovation (ONTO) EBITDA Margin (2010 - 2026) Analysis & Trends

Onto Innovation (ONTO) has reported EBITDA Margin for 17 consecutive years, with 11.48% the latest figure, recorded in Q1 2026.

  • EBITDA Margin for Q1 2026 came in at 11.48%, down 1220.0% year-over-year; the trailing twelve-month figure through Mar 2026 was 10.02% (down 1022.0% YoY), and the FY2026 annual result was 13.22%, down 573.0% from the prior year.
  • EBITDA Margin for Q1 2026 stood at 11.48%, up from 5.19% in the prior quarter.
  • The five-year high for EBITDA Margin was 24.34% in Q2 2022, with the low at 5.19% in Q1 2026.
  • A 5-year average of 17.12% and a median of 16.41% in 2023 frame the typical range for EBITDA Margin.
  • Across the five-year window, EBITDA Margin jumped 810 bps in 2022 and slumped 1220 bps in 2026, its largest moves.
  • Onto Innovation's EBITDA Margin stood at 24.17% in 2022, then plunged by 47 bps to 12.9% in 2023, then advanced by 25 bps to 16.09% in 2024, then tumbled by 33 bps to 10.86% in 2025, then advanced by 6 bps to 11.48% in 2026.
  • The last three EBITDA Margin figures came in at 11.48% (Q1 2026), 5.19% (Q1 2026), and 10.86% (Q3 2025), per Business Quant data.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) EBITDA Margin (Qtr)
1 Asml Holding 636.08 Bn 620.57 Bn 5.90 Bn 51.98%
2 Applied Materials 406.04 Bn 399.30 Bn 3.95 Bn 31.90%
3 Lam Research 369.24 Bn 364.49 Bn 2.91 Bn 35.04%
4 Kla 240.65 Bn 238.86 Bn 2.09 Bn 41.21%
5 Teradyne 58.07 Bn 57.82 Bn 780.95 Mn 36.88%
6 Qnity Electronics 27.70 Bn 26.85 Bn 618.00 Mn 26.69%
7 Entegris 18.25 Bn 17.80 Bn 380.80 Mn 17.44%
8 Onto Innovation 12.83 Bn 12.17 Bn 146.39 Mn 11.48%
9 Amkor Technology 12.41 Bn 9.90 Bn 318.59 Mn 10.53%
10 Formfactor 8.32 Bn 8.14 Bn 86.79 Mn 7.36%

Historic Data

Download Data
DateValue
Mar 31, 2026 11.48%
Jan 3, 2026 5.19%
Sep 27, 2025 10.86%
Jun 28, 2025 12.72%
Mar 29, 2025 23.68%
Dec 28, 2024 16.09%
Sep 28, 2024 21.04%
Jun 29, 2024 20.15%
Mar 30, 2024 18.68%
Dec 30, 2023 12.90%
Sep 30, 2023 16.41%
Jul 1, 2023 13.01%
Apr 1, 2023 14.58%
Dec 31, 2022 24.17%
Oct 1, 2022 23.33%
Jul 2, 2022 22.41%
Apr 2, 2022 24.34%
Sep 25, 2021 21.50%
Jun 26, 2021 18.59%
Mar 27, 2021 16.24%