Onto Innovation (ONTO) EBITDA Margin (2010 - 2026)

Onto Innovation (ONTO) posted quarterly EBITDA Margin of 11.48% for Q1 2026, down 1220.0% YoY from 1.02% in Q1 2025, and up 136.1% sequentially from 31.8% in Q1 2026.

Onto Innovation (ONTO) EBITDA Margin (2010 - 2026) Analysis & Trends

Onto Innovation has disclosed EBITDA Margin across 17 years of filings, most recently posting 11.48% for Q1 2026.

  • In Q1 2026, EBITDA Margin fell 1220.0% year-over-year to 11.48%; the TTM figure through Mar 2026 stood at 0.45% (down 1980.0% YoY), while the FY2026 annual figure was 3.4%, down 1555.0% from the prior year.
  • EBITDA Margin climbed to 11.48% in Q1 2026, from 31.8% in the prior quarter.
  • Over the last five years, EBITDA Margin for ONTO reached as high as 24.34% in Q2 2022 and fell as low as 49.26% in Q4 2022.
  • The 5-year median for EBITDA Margin is 16.09% (2024), against an average of 8.25%.
  • Annual changes were most pronounced in 2024 — EBITDA Margin jumped 4351 bps — and 2026, when it slumped 4789 bps.
  • A 5-year view of EBITDA Margin shows it stood at 49.26% in 2022, then soared by 44 bps to 27.42% in 2023, then soared by 159 bps to 16.09% in 2024, then sank by 33 bps to 10.86% in 2025, then advanced by 6 bps to 11.48% in 2026.
  • According to Business Quant data, EBITDA Margin over the past three periods registered 11.48%, 31.8%, and 10.86% for Q1 2026, Q1 2026, and Q3 2025 respectively.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) EBITDA Margin (Qtr)
1 Applied Materials 516.82 Bn 510.08 Bn 3.95 Bn 31.90%
2 Lam Research 488.97 Bn 484.22 Bn 2.91 Bn 35.04%
3 Kla 348.47 Bn 343.51 Bn 2.09 Bn 41.21%
4 Teradyne 66.84 Bn 66.60 Bn 780.95 Mn 36.88%
5 Qnity Electronics 32.19 Bn 32.35 Bn 618.00 Mn 26.69%
6 Entegris 25.16 Bn 24.72 Bn 380.80 Mn 17.44%
7 Amkor Technology 19.80 Bn 17.99 Bn 239.03 Mn 5.95%
8 Formfactor 11.45 Bn 11.15 Bn 86.79 Mn 7.36%
9 ACM Research 7.71 Bn 7.32 Bn 107.24 Mn 23.36%
10 Onto Innovation 17.59 Mn -636.57 Mn 146.39 Mn 11.48%

Historic Data

Download Data
DateValue
Mar 31, 2026 11.48%
Jan 3, 2026 -31.80%
Sep 27, 2025 10.86%
Jun 28, 2025 12.72%
Mar 29, 2025 23.68%
Dec 28, 2024 16.09%
Sep 28, 2024 21.04%
Jun 29, 2024 20.15%
Mar 30, 2024 18.68%
Dec 30, 2023 -27.42%
Sep 30, 2023 16.41%
Jul 1, 2023 13.01%
Apr 1, 2023 14.58%
Dec 31, 2022 -49.26%
Oct 1, 2022 23.33%
Jul 2, 2022 22.41%
Apr 2, 2022 24.34%
Sep 25, 2021 21.50%
Jun 26, 2021 18.59%
Mar 27, 2021 16.24%