Onto Innovation ONTO
NYSE ONTO
$293.33 -5.51 (-1.84%)
At close: Aug 21, 2026 · 4:00 PM EDT

Onto Innovation (ONTO) Capital Expenditures (2011 - 2026)

Onto Innovation (ONTO) posted quarterly Capital Expenditures of $3.6 million for Q1 2026, down 56.46% year-over-year from $8.2 million in Q1 2025, and down 30.1% quarter-over-quarter from $5.1 million in Q1 2026.

Onto Innovation (ONTO) Capital Expenditures (2011 - 2026) Analysis & Trends

Onto Innovation (ONTO) has reported Capital Expenditures for 16 consecutive years, with $3.6 million the latest figure, recorded in Q1 2026.

  • In Q1 2026, Capital Expenditures fell 56.46% year-over-year to $3.6 million; the TTM figure through Mar 2026 stood at $23.9 million (down 28.03% YoY), while the FY2026 annual figure was $28.5 million, down 10.63% from the prior year.
  • Capital Expenditures declined to $3.6 million in Q1 2026 per ONTO's latest filing, from $5.1 million in the prior quarter.
  • Across five years, Capital Expenditures topped out at $13.8 million in Q2 2025 and bottomed at $1.4 million in Q3 2025.
  • Historically, Capital Expenditures has averaged $6.2 million across 5 years, with a median of $5.1 million in 2026.
  • Annual changes were most pronounced in 2023 — Capital Expenditures jumped 214.96% — and 2025, when it slumped 82.87%.
  • Onto Innovation's Capital Expenditures stood at $8.6 million in 2022, then slumped by 71.42% to $2.5 million in 2023, then soared by 87.82% to $4.6 million in 2024, then tumbled by 70.19% to $1.4 million in 2025, then jumped by 159.97% to $3.6 million in 2026.
  • Business Quant data shows ONTO's Capital Expenditures at $3.6 million in Q1 2026, $5.1 million in Q1 2026, and $1.4 million in Q3 2025.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) Capex (Qtr)
1 Asml Holding 683.77 Bn 668.27 Bn 5.90 Bn -
2 Lam Research 393.97 Bn 388.39 Bn 3.48 Bn 188.80 Mn
3 Applied Materials 389.80 Bn 381.56 Bn 3.95 Bn 635.00 Mn
4 Kla 240.86 Bn 239.21 Bn 2.24 Bn 89.29 Mn
5 Teradyne 58.87 Bn 58.52 Bn 794.62 Mn 90.71 Mn
6 Qnity Electronics 27.06 Bn 26.10 Bn 666.00 Mn 90.00 Mn
7 Entegris 21.93 Bn 21.58 Bn 420.00 Mn 39.30 Mn
8 Onto Innovation 14.50 Bn 12.61 Bn 183.25 Mn 3.66 Mn
9 Amkor Technology 12.45 Bn 9.94 Bn 318.59 Mn 306.79 Mn
10 Nova 11.32 Bn 10.80 Bn 144.16 Mn -2.49 Mn

Historic Data

Download Data
DateValue
Jun 30, 2026 3.66 Mn
Jun 30, 2026 3.66 Mn
Mar 31, 2026 3.59 Mn
Mar 31, 2026 3.59 Mn
Jan 3, 2026 5.13 Mn
Jan 3, 2026 5.13 Mn
Sep 27, 2025 1.38 Mn
Sep 27, 2025 1.38 Mn
Jun 28, 2025 13.77 Mn
Jun 28, 2025 13.77 Mn
Mar 29, 2025 8.23 Mn
Mar 29, 2025 8.23 Mn
Dec 28, 2024 4.63 Mn
Dec 28, 2024 4.63 Mn
Sep 28, 2024 8.05 Mn
Sep 28, 2024 8.05 Mn
Jun 29, 2024 12.25 Mn
Jun 29, 2024 12.25 Mn
Mar 30, 2024 6.98 Mn
Mar 30, 2024 6.98 Mn