Onto Innovation (ONTO) Capital Expenditures (2011 - 2026)
Onto Innovation (ONTO) recorded quarterly Capital Expenditures of $3.6 million in Q1 2026, down 30.1% quarter-over-quarter from $5.1 million in Q1 2026, and down 56.46% on a YoY basis from $8.2 million in Q1 2025.
Onto Innovation (ONTO) Capital Expenditures (2011 - 2026) Analysis & Trends
Onto Innovation's Capital Expenditures history runs 16 years deep, the most recent figure standing at $3.6 million for Q1 2026.
- In Q1 2026, Capital Expenditures fell 56.46% year-over-year to $3.6 million; the TTM figure through Mar 2026 stood at $23.9 million (down 28.03% YoY), while the FY2026 annual figure was $28.5 million, down 10.63% from the prior year.
- Capital Expenditures was $3.6 million for Q1 2026 at Onto Innovation, down from $5.1 million in the prior quarter.
- In the past five years, Capital Expenditures ranged from a high of $13.8 million in Q2 2025 to a low of $1.4 million in Q3 2025.
- Historically, Capital Expenditures has averaged $6.2 million across 5 years, with a median of $5.1 million in 2026.
- The sharpest annual moves came in 2023 and 2025: Capital Expenditures surged 214.96% in 2023, then tumbled 82.87% in 2025.
- A 5-year view of Capital Expenditures shows it stood at $8.6 million in 2022, then tumbled by 71.42% to $2.5 million in 2023, then jumped by 87.82% to $4.6 million in 2024, then plunged by 70.19% to $1.4 million in 2025, then surged by 159.97% to $3.6 million in 2026.
- The last three Capital Expenditures figures came in at $3.6 million (Q1 2026), $5.1 million (Q1 2026), and $1.4 million (Q3 2025), per Business Quant data.
Peer Comparison
| # | Company | Market Cap | Enterprise Value | Gross Profit (Qtr) | Capital Expenditures (Qtr) |
|---|---|---|---|---|---|
| 1 | Asml Holding | 14,996,080.76 Bn | 14,996,065.25 Bn | 5.90 Bn | - |
| 2 | Lam Research | 409.52 Bn | 404.77 Bn | 2.91 Bn | -57.88 Mn |
| 3 | Applied Materials | 389.06 Bn | 382.32 Bn | 3.95 Bn | 635.00 Mn |
| 4 | Kla | 280.01 Bn | 275.05 Bn | 2.09 Bn | 85.19 Mn |
| 5 | Teradyne | 57.58 Bn | 57.34 Bn | 780.95 Mn | - |
| 6 | Qnity Electronics | 30.30 Bn | 30.47 Bn | 618.00 Mn | 122.00 Mn |
| 7 | Entegris | 20.39 Bn | 19.94 Bn | 380.80 Mn | 41.50 Mn |
| 8 | Amkor Technology | 17.53 Bn | 15.72 Bn | 239.03 Mn | 381.64 Mn |
| 9 | Onto Innovation | 13.62 Bn | 12.97 Bn | 146.39 Mn | 3.59 Mn |
| 10 | Formfactor | 9.34 Bn | 9.04 Bn | 86.79 Mn | 15.19 Mn |
Historic Data
Download Data| Date | Value |
|---|---|
| Mar 31, 2026 | 3.59 Mn |
| Mar 31, 2026 | 3.59 Mn |
| Jan 3, 2026 | 5.13 Mn |
| Jan 3, 2026 | 5.13 Mn |
| Sep 27, 2025 | 1.38 Mn |
| Sep 27, 2025 | 1.38 Mn |
| Jun 28, 2025 | 13.77 Mn |
| Jun 28, 2025 | 13.77 Mn |
| Mar 29, 2025 | 8.23 Mn |
| Mar 29, 2025 | 8.23 Mn |
| Dec 28, 2024 | 4.63 Mn |
| Dec 28, 2024 | 4.63 Mn |
| Sep 28, 2024 | 8.05 Mn |
| Sep 28, 2024 | 8.05 Mn |
| Jun 29, 2024 | 12.25 Mn |
| Jun 29, 2024 | 12.25 Mn |
| Mar 30, 2024 | 6.98 Mn |
| Mar 30, 2024 | 6.98 Mn |
| Dec 30, 2023 | 2.46 Mn |
| Dec 30, 2023 | 2.46 Mn |