Onto Innovation ONTO
NYSE ONTO
$281.19 +12.27 (+4.56%)
As of: Sep 11, 2026 · 3:59 PM EDT

Onto Innovation (ONTO) Capital Expenditures (2011 - 2026)

Onto Innovation's (ONTO) quarterly Capital Expenditures came in at $3.7 million in Q2 2026, down 73.45% year-over-year from $13.8 million in Q2 2025, and up 2.01% quarter-over-quarter from $3.6 million in Q1 2026.

Analysis

Onto Innovation (ONTO) Capital Expenditures (2011 - 2026) Analysis & Trends

Onto Innovation (ONTO) has reported Capital Expenditures for 16 consecutive years, with $3.7 million the latest figure, recorded in Q2 2026.

  • On a quarterly basis, Capital Expenditures fell 73.45% year-over-year to $3.7 million in Q2 2026; TTM through Jun 2026 was $13.8 million, a 60.35% decrease from a year earlier, with the FY2026 full-year figure at $28.5 million, down 10.63% from the prior year.
  • Capital Expenditures was $3.7 million for Q2 2026 at Onto Innovation, up from $3.6 million in the prior quarter.
  • Over five years, Capital Expenditures peaked at $13.8 million in Q2 2025 and troughed at $1.4 million in Q3 2025.
  • A 5-year average of $6.0 million and a median of $4.9 million in 2024 frame the typical range for Capital Expenditures.
  • Across the five-year window, Capital Expenditures soared 214.96% in 2023 and tumbled 82.87% in 2025, its largest moves.
  • Over 5 years, Capital Expenditures stood at $8.6 million in 2022, then slumped by 71.42% to $2.5 million in 2023, then jumped by 87.82% to $4.6 million in 2024, then tumbled by 70.19% to $1.4 million in 2025, then jumped by 165.19% to $3.7 million in 2026.
  • The last three Capital Expenditures figures came in at $3.7 million (Q2 2026), $3.6 million (Q1 2026), and $5.1 million (Q1 2026), per Business Quant data.
Peer Set

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) Capital Expenditures (Qtr)
1 Lam Research 374.58 Bn 369.00 Bn 3.48 Bn 188.80 Mn
2 Applied Materials 362.85 Bn 353.62 Bn 4.59 Bn 707.00 Mn
3 Kla 237.04 Bn 235.39 Bn 2.24 Bn 89.29 Mn
4 Mks 18.07 Bn 17.46 Bn 595.00 Mn 54.00 Mn
5 Onto Innovation 13.82 Bn 11.94 Bn 183.25 Mn 3.66 Mn
6 Nova 11.15 Bn 10.53 Bn 144.16 Mn -2.49 Mn
7 Camtek 6.80 Bn 6.49 Bn 66.70 Mn -
8 ACM Research 4.89 Bn 3.55 Bn 134.62 Mn 65.11 Mn
9 Kulicke & Soffa Industries 4.50 Bn 3.98 Bn 157.95 Mn 4.28 Mn
10 Axcelis Technologies 3.52 Bn 3.12 Bn 91.19 Mn 3.55 Mn
Historic Data

Historic Data

Download Data
DateValue
Jun 30, 2026 3.66 Mn
Mar 31, 2026 3.59 Mn
Jan 3, 2026 5.13 Mn
Sep 27, 2025 1.38 Mn
Jun 28, 2025 13.77 Mn
Mar 29, 2025 8.23 Mn
Dec 28, 2024 4.63 Mn
Sep 28, 2024 8.05 Mn
Jun 29, 2024 12.25 Mn
Mar 30, 2024 6.98 Mn
Dec 30, 2023 2.46 Mn
Sep 30, 2023 7.65 Mn
Jul 1, 2023 4.61 Mn
Apr 1, 2023 7.86 Mn
Dec 31, 2022 8.62 Mn
Oct 1, 2022 2.88 Mn
Jul 2, 2022 4.41 Mn
Apr 2, 2022 2.49 Mn
Mar 27, 2021 3.88 Mn
Dec 26, 2020 438,000.00