Onto Innovation (ONTO) Capital Expenditures (2011 - 2026)
Onto Innovation (ONTO) recorded quarterly Capital Expenditures of $3.6 million in Q1 2026, down 30.1% on a QoQ basis from $5.1 million in Q1 2026, and down 56.46% YoY from $8.2 million in Q1 2025.
Onto Innovation (ONTO) Capital Expenditures (2011 - 2026) Analysis & Trends
Onto Innovation (ONTO) has reported Capital Expenditures for 16 consecutive years, with $3.6 million the latest figure, recorded in Q1 2026.
- Capital Expenditures for Q1 2026 came in at $3.6 million, down 56.46% year-over-year; the trailing twelve-month figure through Mar 2026 was $23.9 million (down 28.03% YoY), and the FY2026 annual result was $28.5 million, down 10.63% from the prior year.
- Capital Expenditures for Q1 2026 stood at $3.6 million, down from $5.1 million in the prior quarter.
- The five-year high for Capital Expenditures was $13.8 million in Q2 2025, with the low at $1.4 million in Q3 2025.
- A 5-year average of $6.2 million and a median of $5.1 million in 2026 frame the typical range for Capital Expenditures.
- Across the five-year window, Capital Expenditures jumped 214.96% in 2023 and slumped 82.87% in 2025, its largest moves.
- Onto Innovation's Capital Expenditures stood at $8.6 million in 2022, then sank by 71.42% to $2.5 million in 2023, then surged by 87.82% to $4.6 million in 2024, then slumped by 70.19% to $1.4 million in 2025, then soared by 159.97% to $3.6 million in 2026.
- The last three Capital Expenditures figures came in at $3.6 million (Q1 2026), $5.1 million (Q1 2026), and $1.4 million (Q3 2025), per Business Quant data.
Peer Comparison
| # | Company | Market Cap | Enterprise Value | Gross Profit (Qtr) | Capital Expenditures (Qtr) |
|---|---|---|---|---|---|
| 1 | Asml Holding | 636.08 Bn | 620.57 Bn | 5.90 Bn | - |
| 2 | Applied Materials | 406.04 Bn | 399.30 Bn | 3.95 Bn | 635.00 Mn |
| 3 | Lam Research | 369.24 Bn | 364.49 Bn | 2.91 Bn | 635.01 Mn |
| 4 | Kla | 240.65 Bn | 238.86 Bn | 2.09 Bn | 85.19 Mn |
| 5 | Teradyne | 58.07 Bn | 57.82 Bn | 780.95 Mn | 5.42 Mn |
| 6 | Qnity Electronics | 27.70 Bn | 26.85 Bn | 618.00 Mn | 122.00 Mn |
| 7 | Entegris | 18.25 Bn | 17.80 Bn | 380.80 Mn | 18.60 Mn |
| 8 | Onto Innovation | 12.83 Bn | 12.17 Bn | 146.39 Mn | 3.59 Mn |
| 9 | Amkor Technology | 12.41 Bn | 9.90 Bn | 318.59 Mn | 306.79 Mn |
| 10 | Formfactor | 8.32 Bn | 8.14 Bn | 86.79 Mn | 15.19 Mn |
Historic Data
Download Data| Date | Value |
|---|---|
| Mar 31, 2026 | 3.59 Mn |
| Mar 31, 2026 | 3.59 Mn |
| Jan 3, 2026 | 5.13 Mn |
| Jan 3, 2026 | 5.13 Mn |
| Sep 27, 2025 | 1.38 Mn |
| Sep 27, 2025 | 1.38 Mn |
| Jun 28, 2025 | 13.77 Mn |
| Jun 28, 2025 | 13.77 Mn |
| Mar 29, 2025 | 8.23 Mn |
| Mar 29, 2025 | 8.23 Mn |
| Dec 28, 2024 | 4.63 Mn |
| Dec 28, 2024 | 4.63 Mn |
| Sep 28, 2024 | 8.05 Mn |
| Sep 28, 2024 | 8.05 Mn |
| Jun 29, 2024 | 12.25 Mn |
| Jun 29, 2024 | 12.25 Mn |
| Mar 30, 2024 | 6.98 Mn |
| Mar 30, 2024 | 6.98 Mn |
| Dec 30, 2023 | 2.46 Mn |
| Dec 30, 2023 | 2.46 Mn |