Onto Innovation (ONTO) Capital Expenditures (2011 - 2026)

Onto Innovation (ONTO) recorded quarterly Capital Expenditures of $3.6 million in Q1 2026, down 30.1% quarter-over-quarter from $5.1 million in Q1 2026, and down 56.46% on a YoY basis from $8.2 million in Q1 2025.

Onto Innovation (ONTO) Capital Expenditures (2011 - 2026) Analysis & Trends

Onto Innovation's Capital Expenditures history runs 16 years deep, the most recent figure standing at $3.6 million for Q1 2026.

  • In Q1 2026, Capital Expenditures fell 56.46% year-over-year to $3.6 million; the TTM figure through Mar 2026 stood at $23.9 million (down 28.03% YoY), while the FY2026 annual figure was $28.5 million, down 10.63% from the prior year.
  • Capital Expenditures was $3.6 million for Q1 2026 at Onto Innovation, down from $5.1 million in the prior quarter.
  • In the past five years, Capital Expenditures ranged from a high of $13.8 million in Q2 2025 to a low of $1.4 million in Q3 2025.
  • Historically, Capital Expenditures has averaged $6.2 million across 5 years, with a median of $5.1 million in 2026.
  • The sharpest annual moves came in 2023 and 2025: Capital Expenditures surged 214.96% in 2023, then tumbled 82.87% in 2025.
  • A 5-year view of Capital Expenditures shows it stood at $8.6 million in 2022, then tumbled by 71.42% to $2.5 million in 2023, then jumped by 87.82% to $4.6 million in 2024, then plunged by 70.19% to $1.4 million in 2025, then surged by 159.97% to $3.6 million in 2026.
  • The last three Capital Expenditures figures came in at $3.6 million (Q1 2026), $5.1 million (Q1 2026), and $1.4 million (Q3 2025), per Business Quant data.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) Capital Expenditures (Qtr)
1 Asml Holding 14,996,080.76 Bn 14,996,065.25 Bn 5.90 Bn -
2 Lam Research 409.52 Bn 404.77 Bn 2.91 Bn -57.88 Mn
3 Applied Materials 389.06 Bn 382.32 Bn 3.95 Bn 635.00 Mn
4 Kla 280.01 Bn 275.05 Bn 2.09 Bn 85.19 Mn
5 Teradyne 57.58 Bn 57.34 Bn 780.95 Mn -
6 Qnity Electronics 30.30 Bn 30.47 Bn 618.00 Mn 122.00 Mn
7 Entegris 20.39 Bn 19.94 Bn 380.80 Mn 41.50 Mn
8 Amkor Technology 17.53 Bn 15.72 Bn 239.03 Mn 381.64 Mn
9 Onto Innovation 13.62 Bn 12.97 Bn 146.39 Mn 3.59 Mn
10 Formfactor 9.34 Bn 9.04 Bn 86.79 Mn 15.19 Mn

Historic Data

Download Data
DateValue
Mar 31, 2026 3.59 Mn
Mar 31, 2026 3.59 Mn
Jan 3, 2026 5.13 Mn
Jan 3, 2026 5.13 Mn
Sep 27, 2025 1.38 Mn
Sep 27, 2025 1.38 Mn
Jun 28, 2025 13.77 Mn
Jun 28, 2025 13.77 Mn
Mar 29, 2025 8.23 Mn
Mar 29, 2025 8.23 Mn
Dec 28, 2024 4.63 Mn
Dec 28, 2024 4.63 Mn
Sep 28, 2024 8.05 Mn
Sep 28, 2024 8.05 Mn
Jun 29, 2024 12.25 Mn
Jun 29, 2024 12.25 Mn
Mar 30, 2024 6.98 Mn
Mar 30, 2024 6.98 Mn
Dec 30, 2023 2.46 Mn
Dec 30, 2023 2.46 Mn