Onto Innovation (ONTO) Capital Expenditures (2011 - 2026)
Onto Innovation (ONTO) posted quarterly Capital Expenditures of $3.6 million for Q1 2026, down 56.46% year-over-year from $8.2 million in Q1 2025, and down 30.1% quarter-over-quarter from $5.1 million in Q1 2026.
Onto Innovation (ONTO) Capital Expenditures (2011 - 2026) Analysis & Trends
Onto Innovation (ONTO) has reported Capital Expenditures for 16 consecutive years, with $3.6 million the latest figure, recorded in Q1 2026.
- In Q1 2026, Capital Expenditures fell 56.46% year-over-year to $3.6 million; the TTM figure through Mar 2026 stood at $23.9 million (down 28.03% YoY), while the FY2026 annual figure was $28.5 million, down 10.63% from the prior year.
- Capital Expenditures declined to $3.6 million in Q1 2026 per ONTO's latest filing, from $5.1 million in the prior quarter.
- Across five years, Capital Expenditures topped out at $13.8 million in Q2 2025 and bottomed at $1.4 million in Q3 2025.
- Historically, Capital Expenditures has averaged $6.2 million across 5 years, with a median of $5.1 million in 2026.
- Annual changes were most pronounced in 2023 — Capital Expenditures jumped 214.96% — and 2025, when it slumped 82.87%.
- Onto Innovation's Capital Expenditures stood at $8.6 million in 2022, then slumped by 71.42% to $2.5 million in 2023, then soared by 87.82% to $4.6 million in 2024, then tumbled by 70.19% to $1.4 million in 2025, then jumped by 159.97% to $3.6 million in 2026.
- Business Quant data shows ONTO's Capital Expenditures at $3.6 million in Q1 2026, $5.1 million in Q1 2026, and $1.4 million in Q3 2025.
Peer Comparison
| # | Company | Market Cap | Enterprise Value | Gross Profit (Qtr) | Capex (Qtr) |
|---|---|---|---|---|---|
| 1 | Asml Holding | 683.77 Bn | 668.27 Bn | 5.90 Bn | - |
| 2 | Lam Research | 393.97 Bn | 388.39 Bn | 3.48 Bn | 188.80 Mn |
| 3 | Applied Materials | 389.80 Bn | 381.56 Bn | 3.95 Bn | 635.00 Mn |
| 4 | Kla | 240.86 Bn | 239.21 Bn | 2.24 Bn | 89.29 Mn |
| 5 | Teradyne | 58.87 Bn | 58.52 Bn | 794.62 Mn | 90.71 Mn |
| 6 | Qnity Electronics | 27.06 Bn | 26.10 Bn | 666.00 Mn | 90.00 Mn |
| 7 | Entegris | 21.93 Bn | 21.58 Bn | 420.00 Mn | 39.30 Mn |
| 8 | Onto Innovation | 14.50 Bn | 12.61 Bn | 183.25 Mn | 3.66 Mn |
| 9 | Amkor Technology | 12.45 Bn | 9.94 Bn | 318.59 Mn | 306.79 Mn |
| 10 | Nova | 11.32 Bn | 10.80 Bn | 144.16 Mn | -2.49 Mn |
Historic Data
Download Data| Date | Value |
|---|---|
| Jun 30, 2026 | 3.66 Mn |
| Jun 30, 2026 | 3.66 Mn |
| Mar 31, 2026 | 3.59 Mn |
| Mar 31, 2026 | 3.59 Mn |
| Jan 3, 2026 | 5.13 Mn |
| Jan 3, 2026 | 5.13 Mn |
| Sep 27, 2025 | 1.38 Mn |
| Sep 27, 2025 | 1.38 Mn |
| Jun 28, 2025 | 13.77 Mn |
| Jun 28, 2025 | 13.77 Mn |
| Mar 29, 2025 | 8.23 Mn |
| Mar 29, 2025 | 8.23 Mn |
| Dec 28, 2024 | 4.63 Mn |
| Dec 28, 2024 | 4.63 Mn |
| Sep 28, 2024 | 8.05 Mn |
| Sep 28, 2024 | 8.05 Mn |
| Jun 29, 2024 | 12.25 Mn |
| Jun 29, 2024 | 12.25 Mn |
| Mar 30, 2024 | 6.98 Mn |
| Mar 30, 2024 | 6.98 Mn |