Growth Metrics

Onto Innovation (ONTO) Capital Expenditures (2016 - 2026)

Onto Innovation has reported Capital Expenditures over the past 16 years, most recently at $5.1 million for Q1 2026.

  • For Q1 2026, Capital Expenditures rose 10.87% year-over-year to $5.1 million; the TTM value through Jan 2026 reached $28.5 million, down 10.63%, while the annual FY2026 figure was $28.5 million, 10.63% down from the prior year.
  • Capital Expenditures for Q1 2026 was $5.1 million at Onto Innovation, up from $1.4 million in the prior quarter.
  • Over five years, Capital Expenditures peaked at $13.8 million in Q2 2025 and troughed at $1.4 million in Q3 2025.
  • A 5-year average of $6.3 million and a median of $6.1 million in 2024 define the central range for Capital Expenditures.
  • Biggest five-year swings in Capital Expenditures: surged 214.96% in 2023 and later plummeted 82.87% in 2025.
  • Year by year, Capital Expenditures stood at $8.6 million in 2022, then plummeted by 71.42% to $2.5 million in 2023, then soared by 87.82% to $4.6 million in 2024, then tumbled by 70.19% to $1.4 million in 2025, then surged by 271.94% to $5.1 million in 2026.
  • Business Quant data shows Capital Expenditures for ONTO at $5.1 million in Q1 2026, $1.4 million in Q3 2025, and $13.8 million in Q2 2025.