Onto Innovation (ONTO) Capital Expenditures (2011 - 2026)

Onto Innovation has disclosed Capital Expenditures across 16 years of filings, most recently posting $3.6 million for Q1 2026.

• In Q1 2026, Capital Expenditures fell 56.46% year-over-year to $3.6 million; the TTM figure through Mar 2026 stood at $23.9 million (down 28.03% YoY), while the FY2026 annual figure was $28.5 million, down 10.63% from the prior year.
• Capital Expenditures eased to $3.6 million in Q1 2026, from $5.1 million in the prior quarter.
• Over the last five years, Capital Expenditures for ONTO reached as high as $13.8 million in Q2 2025 and fell as low as $1.4 million in Q3 2025.
• The 5-year median for Capital Expenditures is $5.1 million (2026), against an average of $6.2 million.
• Annual changes were most pronounced in 2023 — Capital Expenditures jumped 214.96% — and 2025, when it plunged 82.87%.
• A 5-year view of Capital Expenditures shows it stood at $8.6 million in 2022, then tumbled by 71.42% to $2.5 million in 2023, then surged by 87.82% to $4.6 million in 2024, then plunged by 70.19% to $1.4 million in 2025, then soared by 159.97% to $3.6 million in 2026.
• According to Business Quant data, Capital Expenditures over the past three periods registered $3.6 million, $5.1 million, and $1.4 million for Q1 2026, Q1 2026, and Q3 2025 respectively.