Onto Innovation (ONTO) Capital Expenditures (2011 - 2026)

Onto Innovation (ONTO) recorded quarterly Capital Expenditures of $3.6 million in Q1 2026, down 30.1% on a QoQ basis from $5.1 million in Q1 2026, and down 56.46% YoY from $8.2 million in Q1 2025.

Onto Innovation (ONTO) Capital Expenditures (2011 - 2026) Analysis & Trends

Onto Innovation (ONTO) has reported Capital Expenditures for 16 consecutive years, with $3.6 million the latest figure, recorded in Q1 2026.

  • Capital Expenditures for Q1 2026 came in at $3.6 million, down 56.46% year-over-year; the trailing twelve-month figure through Mar 2026 was $23.9 million (down 28.03% YoY), and the FY2026 annual result was $28.5 million, down 10.63% from the prior year.
  • Capital Expenditures for Q1 2026 stood at $3.6 million, down from $5.1 million in the prior quarter.
  • The five-year high for Capital Expenditures was $13.8 million in Q2 2025, with the low at $1.4 million in Q3 2025.
  • A 5-year average of $6.2 million and a median of $5.1 million in 2026 frame the typical range for Capital Expenditures.
  • Across the five-year window, Capital Expenditures jumped 214.96% in 2023 and slumped 82.87% in 2025, its largest moves.
  • Onto Innovation's Capital Expenditures stood at $8.6 million in 2022, then sank by 71.42% to $2.5 million in 2023, then surged by 87.82% to $4.6 million in 2024, then slumped by 70.19% to $1.4 million in 2025, then soared by 159.97% to $3.6 million in 2026.
  • The last three Capital Expenditures figures came in at $3.6 million (Q1 2026), $5.1 million (Q1 2026), and $1.4 million (Q3 2025), per Business Quant data.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) Capital Expenditures (Qtr)
1 Asml Holding 636.08 Bn 620.57 Bn 5.90 Bn -
2 Applied Materials 406.04 Bn 399.30 Bn 3.95 Bn 635.00 Mn
3 Lam Research 369.24 Bn 364.49 Bn 2.91 Bn 635.01 Mn
4 Kla 240.65 Bn 238.86 Bn 2.09 Bn 85.19 Mn
5 Teradyne 58.07 Bn 57.82 Bn 780.95 Mn 5.42 Mn
6 Qnity Electronics 27.70 Bn 26.85 Bn 618.00 Mn 122.00 Mn
7 Entegris 18.25 Bn 17.80 Bn 380.80 Mn 18.60 Mn
8 Onto Innovation 12.83 Bn 12.17 Bn 146.39 Mn 3.59 Mn
9 Amkor Technology 12.41 Bn 9.90 Bn 318.59 Mn 306.79 Mn
10 Formfactor 8.32 Bn 8.14 Bn 86.79 Mn 15.19 Mn

Historic Data

Download Data
DateValue
Mar 31, 2026 3.59 Mn
Mar 31, 2026 3.59 Mn
Jan 3, 2026 5.13 Mn
Jan 3, 2026 5.13 Mn
Sep 27, 2025 1.38 Mn
Sep 27, 2025 1.38 Mn
Jun 28, 2025 13.77 Mn
Jun 28, 2025 13.77 Mn
Mar 29, 2025 8.23 Mn
Mar 29, 2025 8.23 Mn
Dec 28, 2024 4.63 Mn
Dec 28, 2024 4.63 Mn
Sep 28, 2024 8.05 Mn
Sep 28, 2024 8.05 Mn
Jun 29, 2024 12.25 Mn
Jun 29, 2024 12.25 Mn
Mar 30, 2024 6.98 Mn
Mar 30, 2024 6.98 Mn
Dec 30, 2023 2.46 Mn
Dec 30, 2023 2.46 Mn