Entegris (ENTG) Capital Expenditures (2010 - 2026)

Entegris (ENTG) recorded quarterly Capital Expenditures of $41.5 million in Q1 2026, up 501.45% quarter-over-quarter from $6.9 million in Q4 2025, and down 61.57% on a YoY basis from $108.0 million in Q1 2025.

Entegris (ENTG) Capital Expenditures (2010 - 2026) Analysis & Trends

Entegris' Capital Expenditures history runs 17 years deep, the most recent figure standing at $41.5 million for Q1 2026.

  • In Q1 2026, Capital Expenditures fell 61.57% year-over-year to $41.5 million; the TTM figure through Mar 2026 stood at -$42.4 million (down 142.83% YoY), while the FY2025 annual figure was $24.1 million, down 58.16% from the prior year.
  • Capital Expenditures was $41.5 million for Q1 2026 at Entegris, up from $6.9 million in the prior quarter.
  • In the past five years, Capital Expenditures ranged from a high of $184.4 million in Q3 2024 to a low of -$307.6 million in Q4 2023.
  • Historically, Capital Expenditures has averaged $10.1 million across 5 years, with a median of $66.5 million in 2025.
  • Biggest YoY gain for Capital Expenditures was 18837.55% in 2022; the steepest drop was 249.25% in 2022.
  • A 5-year view of Capital Expenditures shows it stood at -$290.5 million in 2022, then decreased by 5.87% to -$307.6 million in 2023, then jumped by 51.07% to -$150.5 million in 2024, then jumped by 104.58% to $6.9 million in 2025, then jumped by 501.45% to $41.5 million in 2026.
  • The last three Capital Expenditures figures came in at $41.5 million (Q1 2026), $6.9 million (Q4 2025), and -$157.3 million (Q3 2025), per Business Quant data.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) Capital Expenditures (Qtr)
1 Asml Holding 14,996,080.76 Bn 14,996,065.25 Bn 5.90 Bn -
2 Lam Research 409.52 Bn 404.77 Bn 2.91 Bn -57.88 Mn
3 Applied Materials 389.06 Bn 382.32 Bn 3.95 Bn 635.00 Mn
4 Kla 280.01 Bn 275.05 Bn 2.09 Bn 85.19 Mn
5 Teradyne 57.58 Bn 57.34 Bn 780.95 Mn -
6 Qnity Electronics 30.30 Bn 30.47 Bn 618.00 Mn 122.00 Mn
7 Entegris 20.39 Bn 19.94 Bn 380.80 Mn 41.50 Mn
8 Amkor Technology 17.53 Bn 15.72 Bn 239.03 Mn 381.64 Mn
9 Onto Innovation 13.62 Bn 12.97 Bn 146.39 Mn 3.59 Mn
10 Formfactor 9.34 Bn 9.04 Bn 86.79 Mn 15.19 Mn

Historic Data

Download Data
DateValue
Mar 28, 2026 41.50 Mn
Mar 28, 2026 41.50 Mn
Dec 31, 2025 6.90 Mn
Dec 31, 2025 6.90 Mn
Sep 27, 2025 -157.30 Mn
Sep 27, 2025 -157.30 Mn
Jun 28, 2025 66.50 Mn
Jun 28, 2025 66.50 Mn
Mar 29, 2025 108.00 Mn
Mar 29, 2025 108.00 Mn
Dec 31, 2024 -150.50 Mn
Dec 31, 2024 -150.50 Mn
Sep 28, 2024 184.40 Mn
Sep 28, 2024 184.40 Mn
Jun 29, 2024 -42.90 Mn
Jun 29, 2024 -42.90 Mn
Mar 30, 2024 66.60 Mn
Mar 30, 2024 66.60 Mn
Dec 31, 2023 -307.58 Mn
Dec 31, 2023 -307.58 Mn