Axcelis Technologies (ACLS) Research & Development (2010 - 2026)

Axcelis Technologies (ACLS) posted Research & Development of $28.5 million for Q1 2026, up 46.97% sequentially from $19.4 million in Q4 2025, and up 5.12% on a YoY basis from $27.1 million in Q1 2025.

Axcelis Technologies (ACLS) Research & Development (2010 - 2026) Analysis & Trends

Axcelis Technologies has disclosed Research & Development across 17 years of filings, most recently posting $28.5 million for Q1 2026.

  • On a quarterly basis, Research & Development rose 5.12% year-over-year to $28.5 million in Q1 2026; TTM through Mar 2026 was $78.8 million, a 26.37% decrease from a year earlier, with the FY2025 full-year figure at $65.4 million, down 38.04% from the prior year.
  • Research & Development came in at $28.5 million for Q1 2026 at Axcelis Technologies, up from $19.4 million in the prior quarter.
  • Over five years, Research & Development peaked at $28.5 million in Q1 2026 and troughed at $15.0 million in Q2 2025.
  • Historically, Research & Development has averaged $20.9 million across 5 years, with a median of $19.4 million in 2025.
  • Year-over-year, Research & Development tumbled 52.21% in 2022 and soared 66.0% in 2024.
  • Axcelis Technologies' Research & Development stood at $15.0 million in 2022, then climbed by 10.82% to $16.7 million in 2023, then jumped by 66.0% to $27.7 million in 2024, then dropped by 29.84% to $19.4 million in 2025, then soared by 46.97% to $28.5 million in 2026.
  • The last three Research & Development figures came in at $28.5 million (Q1 2026), $19.4 million (Q4 2025), and $15.8 million (Q3 2025), per Business Quant data.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) R&D (Qtr)
1 Asml Holding 636.08 Bn 620.57 Bn 5.90 Bn -
2 Applied Materials 406.04 Bn 399.30 Bn 3.95 Bn 233.00 Mn
3 Lam Research 369.24 Bn 364.49 Bn 2.91 Bn 583.20 Mn
4 Kla 240.65 Bn 238.86 Bn 2.09 Bn 388.76 Mn
5 Teradyne 58.07 Bn 57.82 Bn 780.95 Mn 135.56 Mn
6 Qnity Electronics 27.70 Bn 26.85 Bn 618.00 Mn 94.00 Mn
7 Entegris 18.25 Bn 17.80 Bn 380.80 Mn 75.30 Mn
8 Onto Innovation 12.83 Bn 12.17 Bn 146.39 Mn 21.46 Mn
9 Amkor Technology 12.41 Bn 9.90 Bn 318.59 Mn 39.83 Mn
10 Axcelis Technologies 4.02 Bn 3.66 Bn 80.58 Mn 28.52 Mn

Historic Data

Download Data
DateValue
Mar 31, 2026 28.52 Mn
Dec 31, 2025 19.40 Mn
Sep 30, 2025 15.84 Mn
Jun 30, 2025 15.00 Mn
Mar 31, 2025 27.13 Mn
Dec 31, 2024 27.65 Mn
Sep 30, 2024 26.40 Mn
Jun 30, 2024 25.79 Mn
Mar 31, 2024 25.66 Mn
Dec 31, 2023 16.66 Mn
Sep 30, 2023 16.47 Mn
Jun 30, 2023 15.54 Mn
Mar 31, 2023 23.77 Mn
Dec 31, 2022 15.03 Mn
Sep 30, 2022 20.56 Mn
Jun 30, 2022 18.73 Mn
Mar 31, 2022 16.97 Mn
Dec 31, 2021 31.45 Mn
Sep 30, 2021 16.71 Mn
Jun 30, 2021 12.18 Mn