Axcelis Technologies (ACLS) Free Cash Flow (2010 - 2026)

Axcelis Technologies (ACLS) reported Free Cash Flow of $16.3 million for Q1 2026, down 53.21% on a YoY basis from $34.8 million in Q1 2025, and up 283.1% quarter-over-quarter from -$8.9 million in Q4 2025.

Axcelis Technologies (ACLS) Free Cash Flow (2010 - 2026) Analysis & Trends

Axcelis Technologies has reported Free Cash Flow for 17 years, with the latest figure at $16.3 million in Q1 2026.

  • For the quarter ending Q1 2026, Free Cash Flow fell 53.21% year-over-year to $16.3 million; the trailing twelve-month figure through Mar 2026 stood at $88.5 million (down 27.99% YoY), and the FY2025 full-year result was $107.0 million, down 16.81% from the prior year.
  • Free Cash Flow for Q1 2026 stood at $16.3 million, up from -$8.9 million in the prior quarter.
  • The five-year high for Free Cash Flow was $118.6 million in Q4 2022, with the low at -$8.9 million in Q4 2025.
  • Historically, Free Cash Flow has averaged $34.9 million across 5 years, with a median of $34.8 million in 2025.
  • Annual changes were most pronounced in 2023 — Free Cash Flow surged 1760.73% — and 2025, when it slumped 209.6%.
  • Axcelis Technologies' Free Cash Flow stood at $118.6 million in 2022, then slumped by 53.26% to $55.4 million in 2023, then slumped by 85.35% to $8.1 million in 2024, then tumbled by 209.6% to -$8.9 million in 2025, then soared by 283.1% to $16.3 million in 2026.
  • The last three Free Cash Flow figures came in at $16.3 million (Q1 2026), -$8.9 million (Q4 2025), and $43.3 million (Q3 2025), per Business Quant data.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) Free Cash Flow (Qtr)
1 Asml Holding 14,996,080.76 Bn 14,996,065.25 Bn 5.90 Bn -
2 Lam Research 409.52 Bn 404.77 Bn 2.91 Bn 1.20 Bn
3 Applied Materials 389.06 Bn 382.32 Bn 3.95 Bn 210.00 Mn
4 Kla 280.01 Bn 275.05 Bn 2.09 Bn 622.26 Mn
5 Teradyne 57.58 Bn 57.34 Bn 780.95 Mn 265.12 Mn
6 Qnity Electronics 30.30 Bn 30.47 Bn 618.00 Mn 13.00 Mn
7 Entegris 20.39 Bn 19.94 Bn 380.80 Mn 141.50 Mn
8 Amkor Technology 17.53 Bn 15.72 Bn 239.03 Mn -236.55 Mn
9 Onto Innovation 13.62 Bn 12.97 Bn 146.39 Mn 22.74 Mn
10 Axcelis Technologies 5.07 Bn 4.70 Bn 80.58 Mn 16.30 Mn

Historic Data

Download Data
DateValue
Mar 31, 2026 16.30 Mn
Mar 31, 2026 16.30 Mn
Dec 31, 2025 -8.90 Mn
Dec 31, 2025 -8.90 Mn
Sep 30, 2025 43.34 Mn
Sep 30, 2025 43.34 Mn
Jun 30, 2025 37.74 Mn
Jun 30, 2025 37.74 Mn
Mar 31, 2025 34.84 Mn
Mar 31, 2025 34.84 Mn
Dec 31, 2024 8.12 Mn
Dec 31, 2024 8.12 Mn
Sep 30, 2024 41.85 Mn
Sep 30, 2024 41.85 Mn
Jun 30, 2024 38.06 Mn
Jun 30, 2024 38.06 Mn
Mar 31, 2024 40.60 Mn
Mar 31, 2024 40.60 Mn
Dec 31, 2023 55.42 Mn
Dec 31, 2023 55.42 Mn