Axcelis Technologies (ACLS) Free Cash Flow (2010 - 2026)

Axcelis Technologies (ACLS) posted Free Cash Flow of $16.3 million for Q1 2026, up 283.1% sequentially from -$8.9 million in Q4 2025, and down 53.21% on a YoY basis from $34.8 million in Q1 2025.

Axcelis Technologies (ACLS) Free Cash Flow (2010 - 2026) Analysis & Trends

Axcelis Technologies has disclosed Free Cash Flow across 17 years of filings, most recently posting $16.3 million for Q1 2026.

  • On a quarterly basis, Free Cash Flow fell 53.21% year-over-year to $16.3 million in Q1 2026; TTM through Mar 2026 was $88.5 million, a 27.99% decrease from a year earlier, with the FY2025 full-year figure at $107.0 million, down 16.81% from the prior year.
  • Free Cash Flow came in at $16.3 million for Q1 2026 at Axcelis Technologies, up from -$8.9 million in the prior quarter.
  • Over five years, Free Cash Flow peaked at $118.6 million in Q4 2022 and troughed at -$8.9 million in Q4 2025.
  • Historically, Free Cash Flow has averaged $34.9 million across 5 years, with a median of $34.8 million in 2025.
  • Year-over-year, Free Cash Flow jumped 1760.73% in 2023 and slumped 209.6% in 2025.
  • Axcelis Technologies' Free Cash Flow stood at $118.6 million in 2022, then tumbled by 53.26% to $55.4 million in 2023, then tumbled by 85.35% to $8.1 million in 2024, then plunged by 209.6% to -$8.9 million in 2025, then soared by 283.1% to $16.3 million in 2026.
  • The last three Free Cash Flow figures came in at $16.3 million (Q1 2026), -$8.9 million (Q4 2025), and $43.3 million (Q3 2025), per Business Quant data.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) Free Cash Flow (Qtr)
1 Asml Holding 636.08 Bn 620.57 Bn 5.90 Bn -
2 Applied Materials 406.04 Bn 399.30 Bn 3.95 Bn 210.00 Mn
3 Lam Research 369.24 Bn 364.49 Bn 2.91 Bn 506.41 Mn
4 Kla 240.65 Bn 238.86 Bn 2.09 Bn 622.26 Mn
5 Teradyne 58.07 Bn 57.82 Bn 780.95 Mn 259.70 Mn
6 Qnity Electronics 27.70 Bn 26.85 Bn 618.00 Mn 13.00 Mn
7 Entegris 18.25 Bn 17.80 Bn 380.80 Mn 164.40 Mn
8 Onto Innovation 12.83 Bn 12.17 Bn 146.39 Mn 22.74 Mn
9 Amkor Technology 12.41 Bn 9.90 Bn 318.59 Mn -70.30 Mn
10 Axcelis Technologies 4.02 Bn 3.66 Bn 80.58 Mn 16.30 Mn

Historic Data

Download Data
DateValue
Mar 31, 2026 16.30 Mn
Mar 31, 2026 16.30 Mn
Dec 31, 2025 -8.90 Mn
Dec 31, 2025 -8.90 Mn
Sep 30, 2025 43.34 Mn
Sep 30, 2025 43.34 Mn
Jun 30, 2025 37.74 Mn
Jun 30, 2025 37.74 Mn
Mar 31, 2025 34.84 Mn
Mar 31, 2025 34.84 Mn
Dec 31, 2024 8.12 Mn
Dec 31, 2024 8.12 Mn
Sep 30, 2024 41.85 Mn
Sep 30, 2024 41.85 Mn
Jun 30, 2024 38.06 Mn
Jun 30, 2024 38.06 Mn
Mar 31, 2024 40.60 Mn
Mar 31, 2024 40.60 Mn
Dec 31, 2023 55.42 Mn
Dec 31, 2023 55.42 Mn