Axcelis Technologies (ACLS) Free Cash Flow (2010 - 2026)
Axcelis Technologies' (ACLS) quarterly Free Cash Flow came in at $16.3 million in Q1 2026, down 53.21% YoY from $34.8 million in Q1 2025, and up 283.1% on a QoQ basis from -$8.9 million in Q4 2025.
Axcelis Technologies (ACLS) Free Cash Flow (2010 - 2026) Analysis & Trends
Axcelis Technologies (ACLS) has 17 years of Free Cash Flow data on file, last reported at $16.3 million in Q1 2026.
- Quarterly Free Cash Flow fell 53.21% year-over-year to $16.3 million in Q1 2026, while the trailing twelve-month figure through Mar 2026 was $88.5 million (down 27.99% YoY) and the FY2025 annual result came in at $107.0 million, down 16.81% from the prior year.
- Free Cash Flow climbed to $16.3 million in Q1 2026, from -$8.9 million in the prior quarter.
- In the past five years, Free Cash Flow ranged from a high of $118.6 million in Q4 2022 to a low of -$8.9 million in Q4 2025.
- A 5-year average of $34.9 million and a median of $34.8 million in 2025 frame the typical range for Free Cash Flow.
- Annual changes were most pronounced in 2023 — Free Cash Flow surged 1760.73% — and 2025, when it slumped 209.6%.
- Tracing ACLS's Free Cash Flow over 5 years: stood at $118.6 million in 2022, then slumped by 53.26% to $55.4 million in 2023, then slumped by 85.35% to $8.1 million in 2024, then tumbled by 209.6% to -$8.9 million in 2025, then soared by 283.1% to $16.3 million in 2026.
- The last three Free Cash Flow figures came in at $16.3 million (Q1 2026), -$8.9 million (Q4 2025), and $43.3 million (Q3 2025), per Business Quant data.
Peer Comparison
| # | Company | Market Cap | Enterprise Value | Gross Profit (Qtr) | Free Cash Flow (Qtr) |
|---|---|---|---|---|---|
| 1 | Asml Holding | 683.77 Bn | 668.27 Bn | 5.90 Bn | - |
| 2 | Lam Research | 393.97 Bn | 388.39 Bn | 3.48 Bn | 1.27 Bn |
| 3 | Applied Materials | 389.80 Bn | 381.56 Bn | 3.95 Bn | 210.00 Mn |
| 4 | Kla | 240.86 Bn | 239.21 Bn | 2.24 Bn | 817.14 Mn |
| 5 | Teradyne | 58.87 Bn | 58.52 Bn | 794.62 Mn | 378.43 Mn |
| 6 | Qnity Electronics | 27.06 Bn | 26.10 Bn | 666.00 Mn | 151.00 Mn |
| 7 | Entegris | 21.93 Bn | 21.58 Bn | 420.00 Mn | 116.90 Mn |
| 8 | Onto Innovation | 14.50 Bn | 12.61 Bn | 183.25 Mn | 57.85 Mn |
| 9 | Amkor Technology | 12.45 Bn | 9.94 Bn | 318.59 Mn | -70.30 Mn |
| 10 | Axcelis Technologies | 3.89 Bn | 3.49 Bn | 91.19 Mn | 14.82 Mn |
Historic Data
Download Data| Date | Value |
|---|---|
| Jun 30, 2026 | 14.82 Mn |
| Jun 30, 2026 | 14.82 Mn |
| Mar 31, 2026 | 16.30 Mn |
| Mar 31, 2026 | 16.30 Mn |
| Dec 31, 2025 | -8.90 Mn |
| Dec 31, 2025 | -8.90 Mn |
| Sep 30, 2025 | 43.34 Mn |
| Sep 30, 2025 | 43.34 Mn |
| Jun 30, 2025 | 37.74 Mn |
| Jun 30, 2025 | 37.74 Mn |
| Mar 31, 2025 | 34.84 Mn |
| Mar 31, 2025 | 34.84 Mn |
| Dec 31, 2024 | 8.12 Mn |
| Dec 31, 2024 | 8.12 Mn |
| Sep 30, 2024 | 41.85 Mn |
| Sep 30, 2024 | 41.85 Mn |
| Jun 30, 2024 | 38.06 Mn |
| Jun 30, 2024 | 38.06 Mn |
| Mar 31, 2024 | 40.60 Mn |
| Mar 31, 2024 | 40.60 Mn |