Axcelis Technologies (ACLS) Depreciation & Amortization (CF) (2010 - 2026)

Axcelis Technologies (ACLS) posted Depreciation & Amortization (CF) of $4.4 million for Q1 2026, down 0.56% sequentially from $4.5 million in Q4 2025, and up 3.16% on a YoY basis from $4.3 million in Q1 2025.

Axcelis Technologies (ACLS) Depreciation & Amortization (CF) (2010 - 2026) Analysis & Trends

Axcelis Technologies has disclosed Depreciation & Amortization (CF) across 17 years of filings, most recently posting $4.4 million for Q1 2026.

  • On a quarterly basis, Depreciation & Amortization (CF) rose 3.16% year-over-year to $4.4 million in Q1 2026; TTM through Mar 2026 was $17.7 million, a 8.66% increase from a year earlier, with the FY2025 full-year figure at $17.6 million, up 11.41% from the prior year.
  • Depreciation & Amortization (CF) came in at $4.4 million for Q1 2026 at Axcelis Technologies, down from $4.5 million in the prior quarter.
  • Over five years, Depreciation & Amortization (CF) peaked at $4.5 million in Q2 2025 and troughed at $2.8 million in Q1 2022.
  • Historically, Depreciation & Amortization (CF) has averaged $3.7 million across 5 years, with a median of $3.8 million in 2024.
  • Year-over-year, Depreciation & Amortization (CF) grew 22.26% in 2024 and climbed 3.16% in 2026.
  • Axcelis Technologies' Depreciation & Amortization (CF) stood at $3.0 million in 2022, then advanced by 19.65% to $3.6 million in 2023, then rose by 19.16% to $4.3 million in 2024, then rose by 4.55% to $4.5 million in 2025, then fell by 0.56% to $4.4 million in 2026.
  • The last three Depreciation & Amortization (CF) figures came in at $4.4 million (Q1 2026), $4.5 million (Q4 2025), and $4.3 million (Q3 2025), per Business Quant data.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) Depreciation & Amortization (Qtr)
1 Asml Holding 636.08 Bn 620.57 Bn 5.90 Bn -
2 Applied Materials 406.04 Bn 399.30 Bn 3.95 Bn 135.00 Mn
3 Lam Research 369.24 Bn 364.49 Bn 2.91 Bn 116.32 Mn
4 Kla 240.65 Bn 238.86 Bn 2.09 Bn 99.09 Mn
5 Teradyne 58.07 Bn 57.82 Bn 780.95 Mn 32.66 Mn
6 Qnity Electronics 27.70 Bn 26.85 Bn 618.00 Mn 46.00 Mn
7 Entegris 18.25 Bn 17.80 Bn 380.80 Mn 34.10 Mn
8 Onto Innovation 12.83 Bn 12.17 Bn 146.39 Mn 5.80 Mn
9 Amkor Technology 12.41 Bn 9.90 Bn 318.59 Mn 179.65 Mn
10 Axcelis Technologies 4.02 Bn 3.66 Bn 80.58 Mn 4.44 Mn

Historic Data

Download Data
DateValue
Mar 31, 2026 4.44 Mn
Mar 31, 2026 4.44 Mn
Dec 31, 2025 4.46 Mn
Dec 31, 2025 4.46 Mn
Sep 30, 2025 4.33 Mn
Sep 30, 2025 4.33 Mn
Jun 30, 2025 4.52 Mn
Jun 30, 2025 4.52 Mn
Mar 31, 2025 4.30 Mn
Mar 31, 2025 4.30 Mn
Dec 31, 2024 4.27 Mn
Dec 31, 2024 4.27 Mn
Sep 30, 2024 3.91 Mn
Sep 30, 2024 3.91 Mn
Jun 30, 2024 3.86 Mn
Jun 30, 2024 3.86 Mn
Mar 31, 2024 3.78 Mn
Mar 31, 2024 3.78 Mn
Dec 31, 2023 3.58 Mn
Dec 31, 2023 3.58 Mn