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Axcelis Technologies (ACLS) Capital Expenditures (2016 - 2026)

Axcelis Technologies filings provide 16 years of Capital Expenditures readings, the most recent being $2.3 million for Q4 2025.

  • On a quarterly basis, Capital Expenditures fell 49.87% to $2.3 million in Q4 2025 year-over-year; TTM through Dec 2025 was $11.3 million, a 7.27% decrease, with the full-year FY2025 number at $11.3 million, down 7.27% from a year prior.
  • Capital Expenditures hit $2.3 million in Q4 2025 for Axcelis Technologies, up from $2.0 million in the prior quarter.
  • In the past five years, Capital Expenditures ranged from a high of $10.2 million in Q4 2023 to a low of $1.0 million in Q2 2021.
  • Median Capital Expenditures over the past 5 years was $2.6 million (2023), compared with a mean of $3.2 million.
  • Biggest five-year swings in Capital Expenditures: plummeted 54.12% in 2024 and later skyrocketed 206.17% in 2025.
  • Axcelis Technologies' Capital Expenditures stood at $3.0 million in 2021, then increased by 26.18% to $3.8 million in 2022, then skyrocketed by 166.69% to $10.2 million in 2023, then tumbled by 54.12% to $4.7 million in 2024, then plummeted by 49.87% to $2.3 million in 2025.
  • The last three reported values for Capital Expenditures were $2.3 million (Q4 2025), $2.0 million (Q3 2025), and $2.0 million (Q2 2025) per Business Quant data.