Axcelis Technologies (ACLS) Capital Expenditures (2010 - 2026)

Axcelis Technologies (ACLS) posted Capital Expenditures of $1.8 million for Q1 2026, down 21.24% sequentially from $2.3 million in Q4 2025, and down 62.92% on a YoY basis from $5.0 million in Q1 2025.

Axcelis Technologies (ACLS) Capital Expenditures (2010 - 2026) Analysis & Trends

Axcelis Technologies has disclosed Capital Expenditures across 17 years of filings, most recently posting $1.8 million for Q1 2026.

  • On a quarterly basis, Capital Expenditures fell 62.92% year-over-year to $1.8 million in Q1 2026; TTM through Mar 2026 was $8.2 million, a 47.34% decrease from a year earlier, with the FY2025 full-year figure at $11.3 million, down 7.27% from the prior year.
  • Capital Expenditures came in at $1.8 million for Q1 2026 at Axcelis Technologies, down from $2.3 million in the prior quarter.
  • Over five years, Capital Expenditures peaked at $10.2 million in Q4 2023 and troughed at $1.5 million in Q1 2022.
  • Historically, Capital Expenditures has averaged $3.3 million across 5 years, with a median of $2.3 million in 2025.
  • Year-over-year, Capital Expenditures jumped 206.17% in 2025 and plunged 62.92% in 2026.
  • Axcelis Technologies' Capital Expenditures stood at $3.8 million in 2022, then surged by 166.69% to $10.2 million in 2023, then slumped by 54.12% to $4.7 million in 2024, then plunged by 49.87% to $2.3 million in 2025, then slipped by 21.24% to $1.8 million in 2026.
  • The last three Capital Expenditures figures came in at $1.8 million (Q1 2026), $2.3 million (Q4 2025), and $2.0 million (Q3 2025), per Business Quant data.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) Capital Expenditures (Qtr)
1 Asml Holding 636.08 Bn 620.57 Bn 5.90 Bn -
2 Applied Materials 406.04 Bn 399.30 Bn 3.95 Bn 635.00 Mn
3 Lam Research 369.24 Bn 364.49 Bn 2.91 Bn 635.01 Mn
4 Kla 240.65 Bn 238.86 Bn 2.09 Bn 85.19 Mn
5 Teradyne 58.07 Bn 57.82 Bn 780.95 Mn 5.42 Mn
6 Qnity Electronics 27.70 Bn 26.85 Bn 618.00 Mn 122.00 Mn
7 Entegris 18.25 Bn 17.80 Bn 380.80 Mn 18.60 Mn
8 Onto Innovation 12.83 Bn 12.17 Bn 146.39 Mn 3.59 Mn
9 Amkor Technology 12.41 Bn 9.90 Bn 318.59 Mn 306.79 Mn
10 Axcelis Technologies 4.02 Bn 3.66 Bn 80.58 Mn 1.84 Mn

Historic Data

Download Data
DateValue
Mar 31, 2026 1.84 Mn
Mar 31, 2026 1.84 Mn
Dec 31, 2025 2.34 Mn
Dec 31, 2025 2.34 Mn
Sep 30, 2025 2.02 Mn
Sep 30, 2025 2.02 Mn
Jun 30, 2025 1.99 Mn
Jun 30, 2025 1.99 Mn
Mar 31, 2025 4.96 Mn
Mar 31, 2025 4.96 Mn
Dec 31, 2024 4.66 Mn
Dec 31, 2024 4.66 Mn
Sep 30, 2024 3.90 Mn
Sep 30, 2024 3.90 Mn
Jun 30, 2024 2.00 Mn
Jun 30, 2024 2.00 Mn
Mar 31, 2024 1.62 Mn
Mar 31, 2024 1.62 Mn
Dec 31, 2023 10.15 Mn
Dec 31, 2023 10.15 Mn