Axcelis Technologies (ACLS) Capital Expenditures (2010 - 2026)

Axcelis Technologies (ACLS) posted Capital Expenditures of $1.8 million for Q1 2026, down 21.24% quarter-over-quarter from $2.3 million in Q4 2025, and down 62.92% year-on-year from $5.0 million in Q1 2025.

Axcelis Technologies (ACLS) Capital Expenditures (2010 - 2026) Analysis & Trends

Axcelis Technologies (ACLS) has reported Capital Expenditures for 17 consecutive years, with $1.8 million the latest figure, recorded in Q1 2026.

  • Capital Expenditures for Q1 2026 came in at $1.8 million, down 62.92% year-over-year; the trailing twelve-month figure through Mar 2026 was $8.2 million (down 47.34% YoY), and the FY2025 annual result was $11.3 million, down 7.27% from the prior year.
  • Capital Expenditures was $1.8 million for Q1 2026 at Axcelis Technologies, down from $2.3 million in the prior quarter.
  • Over five years, Capital Expenditures peaked at $10.2 million in Q4 2023 and troughed at $1.5 million in Q1 2022.
  • Average Capital Expenditures over 5 years is $3.3 million, with a median of $2.3 million recorded in 2025.
  • Year-over-year, Capital Expenditures jumped 206.17% in 2025 and slumped 62.92% in 2026.
  • Over 5 years, Capital Expenditures stood at $3.8 million in 2022, then surged by 166.69% to $10.2 million in 2023, then plunged by 54.12% to $4.7 million in 2024, then slumped by 49.87% to $2.3 million in 2025, then slipped by 21.24% to $1.8 million in 2026.
  • Per Business Quant data, the three most recent Capital Expenditures figures were $1.8 million in Q1 2026, $2.3 million in Q4 2025, and $2.0 million in Q3 2025.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) Capex (Qtr)
1 Applied Materials 516.82 Bn 510.08 Bn 3.95 Bn 635.00 Mn
2 Lam Research 488.97 Bn 484.22 Bn 2.91 Bn -57.88 Mn
3 Kla 348.47 Bn 343.51 Bn 2.09 Bn 85.19 Mn
4 Teradyne 66.84 Bn 66.60 Bn 780.95 Mn -
5 Qnity Electronics 32.19 Bn 32.35 Bn 618.00 Mn 122.00 Mn
6 Entegris 25.16 Bn 24.72 Bn 380.80 Mn 41.50 Mn
7 Amkor Technology 19.80 Bn 17.99 Bn 239.03 Mn 381.64 Mn
8 Formfactor 11.45 Bn 11.15 Bn 86.79 Mn 15.19 Mn
9 ACM Research 7.71 Bn 7.32 Bn 107.24 Mn 13.18 Mn
10 Axcelis Technologies 5.48 Bn 5.11 Bn 80.58 Mn 1.84 Mn

Historic Data

Download Data
DateValue
Mar 31, 2026 1.84 Mn
Mar 31, 2026 1.84 Mn
Dec 31, 2025 2.34 Mn
Dec 31, 2025 2.34 Mn
Sep 30, 2025 2.02 Mn
Sep 30, 2025 2.02 Mn
Jun 30, 2025 1.99 Mn
Jun 30, 2025 1.99 Mn
Mar 31, 2025 4.96 Mn
Mar 31, 2025 4.96 Mn
Dec 31, 2024 4.66 Mn
Dec 31, 2024 4.66 Mn
Sep 30, 2024 3.90 Mn
Sep 30, 2024 3.90 Mn
Jun 30, 2024 2.00 Mn
Jun 30, 2024 2.00 Mn
Mar 31, 2024 1.62 Mn
Mar 31, 2024 1.62 Mn
Dec 31, 2023 10.15 Mn
Dec 31, 2023 10.15 Mn