Axcelis Technologies (ACLS) Capital Expenditures (2010 - 2026)

Axcelis Technologies (ACLS) reported Capital Expenditures of $1.8 million for Q1 2026, down 62.92% on a YoY basis from $5.0 million in Q1 2025, and down 21.24% quarter-over-quarter from $2.3 million in Q4 2025.

Axcelis Technologies (ACLS) Capital Expenditures (2010 - 2026) Analysis & Trends

Axcelis Technologies has reported Capital Expenditures for 17 years, with the latest figure at $1.8 million in Q1 2026.

  • For the quarter ending Q1 2026, Capital Expenditures fell 62.92% year-over-year to $1.8 million; the trailing twelve-month figure through Mar 2026 stood at $8.2 million (down 47.34% YoY), and the FY2025 full-year result was $11.3 million, down 7.27% from the prior year.
  • Capital Expenditures for Q1 2026 stood at $1.8 million, down from $2.3 million in the prior quarter.
  • The five-year high for Capital Expenditures was $10.2 million in Q4 2023, with the low at $1.5 million in Q1 2022.
  • Historically, Capital Expenditures has averaged $3.3 million across 5 years, with a median of $2.3 million in 2025.
  • Annual changes were most pronounced in 2025 — Capital Expenditures surged 206.17% — and 2026, when it plunged 62.92%.
  • Axcelis Technologies' Capital Expenditures stood at $3.8 million in 2022, then surged by 166.69% to $10.2 million in 2023, then sank by 54.12% to $4.7 million in 2024, then tumbled by 49.87% to $2.3 million in 2025, then fell by 21.24% to $1.8 million in 2026.
  • The last three Capital Expenditures figures came in at $1.8 million (Q1 2026), $2.3 million (Q4 2025), and $2.0 million (Q3 2025), per Business Quant data.

Peer Comparison

# Company Market Cap Enterprise Value Gross Profit (Qtr) Capital Expenditures (Qtr)
1 Asml Holding 14,996,080.76 Bn 14,996,065.25 Bn 5.90 Bn -
2 Lam Research 409.52 Bn 404.77 Bn 2.91 Bn -57.88 Mn
3 Applied Materials 389.06 Bn 382.32 Bn 3.95 Bn 635.00 Mn
4 Kla 280.01 Bn 275.05 Bn 2.09 Bn 85.19 Mn
5 Teradyne 57.58 Bn 57.34 Bn 780.95 Mn -
6 Qnity Electronics 30.30 Bn 30.47 Bn 618.00 Mn 122.00 Mn
7 Entegris 20.39 Bn 19.94 Bn 380.80 Mn 41.50 Mn
8 Amkor Technology 17.53 Bn 15.72 Bn 239.03 Mn 381.64 Mn
9 Onto Innovation 13.62 Bn 12.97 Bn 146.39 Mn 3.59 Mn
10 Axcelis Technologies 5.07 Bn 4.70 Bn 80.58 Mn 1.84 Mn

Historic Data

Download Data
DateValue
Mar 31, 2026 1.84 Mn
Mar 31, 2026 1.84 Mn
Dec 31, 2025 2.34 Mn
Dec 31, 2025 2.34 Mn
Sep 30, 2025 2.02 Mn
Sep 30, 2025 2.02 Mn
Jun 30, 2025 1.99 Mn
Jun 30, 2025 1.99 Mn
Mar 31, 2025 4.96 Mn
Mar 31, 2025 4.96 Mn
Dec 31, 2024 4.66 Mn
Dec 31, 2024 4.66 Mn
Sep 30, 2024 3.90 Mn
Sep 30, 2024 3.90 Mn
Jun 30, 2024 2.00 Mn
Jun 30, 2024 2.00 Mn
Mar 31, 2024 1.62 Mn
Mar 31, 2024 1.62 Mn
Dec 31, 2023 10.15 Mn
Dec 31, 2023 10.15 Mn