Axcelis Technologies (ACLS) Capital Expenditures (2010 - 2026)
Axcelis Technologies (ACLS) posted Capital Expenditures of $1.8 million for Q1 2026, down 21.24% quarter-over-quarter from $2.3 million in Q4 2025, and down 62.92% year-on-year from $5.0 million in Q1 2025.
Axcelis Technologies (ACLS) Capital Expenditures (2010 - 2026) Analysis & Trends
Axcelis Technologies (ACLS) has reported Capital Expenditures for 17 consecutive years, with $1.8 million the latest figure, recorded in Q1 2026.
- Capital Expenditures for Q1 2026 came in at $1.8 million, down 62.92% year-over-year; the trailing twelve-month figure through Mar 2026 was $8.2 million (down 47.34% YoY), and the FY2025 annual result was $11.3 million, down 7.27% from the prior year.
- Capital Expenditures was $1.8 million for Q1 2026 at Axcelis Technologies, down from $2.3 million in the prior quarter.
- Over five years, Capital Expenditures peaked at $10.2 million in Q4 2023 and troughed at $1.5 million in Q1 2022.
- Average Capital Expenditures over 5 years is $3.3 million, with a median of $2.3 million recorded in 2025.
- Year-over-year, Capital Expenditures jumped 206.17% in 2025 and slumped 62.92% in 2026.
- Over 5 years, Capital Expenditures stood at $3.8 million in 2022, then surged by 166.69% to $10.2 million in 2023, then plunged by 54.12% to $4.7 million in 2024, then slumped by 49.87% to $2.3 million in 2025, then slipped by 21.24% to $1.8 million in 2026.
- Per Business Quant data, the three most recent Capital Expenditures figures were $1.8 million in Q1 2026, $2.3 million in Q4 2025, and $2.0 million in Q3 2025.
Peer Comparison
| # | Company | Market Cap | Enterprise Value | Gross Profit (Qtr) | Capex (Qtr) |
|---|---|---|---|---|---|
| 1 | Applied Materials | 516.82 Bn | 510.08 Bn | 3.95 Bn | 635.00 Mn |
| 2 | Lam Research | 488.97 Bn | 484.22 Bn | 2.91 Bn | -57.88 Mn |
| 3 | Kla | 348.47 Bn | 343.51 Bn | 2.09 Bn | 85.19 Mn |
| 4 | Teradyne | 66.84 Bn | 66.60 Bn | 780.95 Mn | - |
| 5 | Qnity Electronics | 32.19 Bn | 32.35 Bn | 618.00 Mn | 122.00 Mn |
| 6 | Entegris | 25.16 Bn | 24.72 Bn | 380.80 Mn | 41.50 Mn |
| 7 | Amkor Technology | 19.80 Bn | 17.99 Bn | 239.03 Mn | 381.64 Mn |
| 8 | Formfactor | 11.45 Bn | 11.15 Bn | 86.79 Mn | 15.19 Mn |
| 9 | ACM Research | 7.71 Bn | 7.32 Bn | 107.24 Mn | 13.18 Mn |
| 10 | Axcelis Technologies | 5.48 Bn | 5.11 Bn | 80.58 Mn | 1.84 Mn |
Historic Data
Download Data| Date | Value |
|---|---|
| Mar 31, 2026 | 1.84 Mn |
| Mar 31, 2026 | 1.84 Mn |
| Dec 31, 2025 | 2.34 Mn |
| Dec 31, 2025 | 2.34 Mn |
| Sep 30, 2025 | 2.02 Mn |
| Sep 30, 2025 | 2.02 Mn |
| Jun 30, 2025 | 1.99 Mn |
| Jun 30, 2025 | 1.99 Mn |
| Mar 31, 2025 | 4.96 Mn |
| Mar 31, 2025 | 4.96 Mn |
| Dec 31, 2024 | 4.66 Mn |
| Dec 31, 2024 | 4.66 Mn |
| Sep 30, 2024 | 3.90 Mn |
| Sep 30, 2024 | 3.90 Mn |
| Jun 30, 2024 | 2.00 Mn |
| Jun 30, 2024 | 2.00 Mn |
| Mar 31, 2024 | 1.62 Mn |
| Mar 31, 2024 | 1.62 Mn |
| Dec 31, 2023 | 10.15 Mn |
| Dec 31, 2023 | 10.15 Mn |