Axcelis Technologies (ACLS) Capital Expenditures (2010 - 2026)
Axcelis Technologies (ACLS) posted Capital Expenditures of $1.8 million for Q1 2026, down 21.24% sequentially from $2.3 million in Q4 2025, and down 62.92% on a YoY basis from $5.0 million in Q1 2025.
Axcelis Technologies (ACLS) Capital Expenditures (2010 - 2026) Analysis & Trends
Axcelis Technologies has disclosed Capital Expenditures across 17 years of filings, most recently posting $1.8 million for Q1 2026.
- On a quarterly basis, Capital Expenditures fell 62.92% year-over-year to $1.8 million in Q1 2026; TTM through Mar 2026 was $8.2 million, a 47.34% decrease from a year earlier, with the FY2025 full-year figure at $11.3 million, down 7.27% from the prior year.
- Capital Expenditures came in at $1.8 million for Q1 2026 at Axcelis Technologies, down from $2.3 million in the prior quarter.
- Over five years, Capital Expenditures peaked at $10.2 million in Q4 2023 and troughed at $1.5 million in Q1 2022.
- Historically, Capital Expenditures has averaged $3.3 million across 5 years, with a median of $2.3 million in 2025.
- Year-over-year, Capital Expenditures jumped 206.17% in 2025 and plunged 62.92% in 2026.
- Axcelis Technologies' Capital Expenditures stood at $3.8 million in 2022, then surged by 166.69% to $10.2 million in 2023, then slumped by 54.12% to $4.7 million in 2024, then plunged by 49.87% to $2.3 million in 2025, then slipped by 21.24% to $1.8 million in 2026.
- The last three Capital Expenditures figures came in at $1.8 million (Q1 2026), $2.3 million (Q4 2025), and $2.0 million (Q3 2025), per Business Quant data.
Peer Comparison
| # | Company | Market Cap | Enterprise Value | Gross Profit (Qtr) | Capital Expenditures (Qtr) |
|---|---|---|---|---|---|
| 1 | Asml Holding | 636.08 Bn | 620.57 Bn | 5.90 Bn | - |
| 2 | Applied Materials | 406.04 Bn | 399.30 Bn | 3.95 Bn | 635.00 Mn |
| 3 | Lam Research | 369.24 Bn | 364.49 Bn | 2.91 Bn | 635.01 Mn |
| 4 | Kla | 240.65 Bn | 238.86 Bn | 2.09 Bn | 85.19 Mn |
| 5 | Teradyne | 58.07 Bn | 57.82 Bn | 780.95 Mn | 5.42 Mn |
| 6 | Qnity Electronics | 27.70 Bn | 26.85 Bn | 618.00 Mn | 122.00 Mn |
| 7 | Entegris | 18.25 Bn | 17.80 Bn | 380.80 Mn | 18.60 Mn |
| 8 | Onto Innovation | 12.83 Bn | 12.17 Bn | 146.39 Mn | 3.59 Mn |
| 9 | Amkor Technology | 12.41 Bn | 9.90 Bn | 318.59 Mn | 306.79 Mn |
| 10 | Axcelis Technologies | 4.02 Bn | 3.66 Bn | 80.58 Mn | 1.84 Mn |
Historic Data
Download Data| Date | Value |
|---|---|
| Mar 31, 2026 | 1.84 Mn |
| Mar 31, 2026 | 1.84 Mn |
| Dec 31, 2025 | 2.34 Mn |
| Dec 31, 2025 | 2.34 Mn |
| Sep 30, 2025 | 2.02 Mn |
| Sep 30, 2025 | 2.02 Mn |
| Jun 30, 2025 | 1.99 Mn |
| Jun 30, 2025 | 1.99 Mn |
| Mar 31, 2025 | 4.96 Mn |
| Mar 31, 2025 | 4.96 Mn |
| Dec 31, 2024 | 4.66 Mn |
| Dec 31, 2024 | 4.66 Mn |
| Sep 30, 2024 | 3.90 Mn |
| Sep 30, 2024 | 3.90 Mn |
| Jun 30, 2024 | 2.00 Mn |
| Jun 30, 2024 | 2.00 Mn |
| Mar 31, 2024 | 1.62 Mn |
| Mar 31, 2024 | 1.62 Mn |
| Dec 31, 2023 | 10.15 Mn |
| Dec 31, 2023 | 10.15 Mn |