ASML Holdings’ Number of Units Sold (2016-2022)

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This statistic highlights ASML Holdings’ number of units sold, split across KrF, ArF Immersion, EUV, I-line, and ArF Dry, reported on a quarterly basis from Q1 2016 onwards.
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This statistic highlights ASML Holdings’ number of units sold, split across KrF, ArF Immersion, EUV, I-line, and ArF Dry, reported on a quarterly basis from Q1 2016 onwards.

ASML Holdings’ Number of Units Sold

Technology Q3 2020 Q2 2021 Q3 2021 Contribution in Q3 2021
KrF 23.0 31.0 30.0 38.0%
ArF Immersion 11.0 16.0 21.0 26.6%
EUV 14.0 9.0 15.0 19.0%
I-line 10.0 9.0 7.0 8.9%
ArF Dry 2.0 7.0 6.0 7.6%
Total 60.0 72.0 79.0 100.0%

(All figures are in units sold, except percentages)

The total number of unit sales rose from 60 units in Q3 2020 to 79 units in Q3 2021, marking a 31.7% growth in sales in just a year. The unit sales also grew by 7 units, from Q2 2021 to Q3 2021, marking a 9.7% growth in unit sales based on a quarter-on-quarter basis.

Krypton Fluoride

Every chip is made of layers and these layers influence the size of the features to be printed on a chip. Different lithography systems are needed for different layers. KrF, also known as Krypton Fluoride is the lithography system used for less critical layers with larger features.

This technology had the highest share of 38% in the unit sales in Q3 2021. The overall sales grew from 23 units to 30 units from Q3 2020 to Q3 2021, leading to a growth of approximately 30.4% in sales in a year. On the contrary, the unit sales fell by 1 unit from Q2 2021 to Q3 2021, marking a 3.2% fall in sales in a quarter.

Argon Fluoride Immersion

As the name suggests, this technology is an immersion system. ArF Immersion lithography helps maintain a thin film of water between the wafer and the lens, which in turn helps to increase NA and improve the resolution to support further shrink.

The total unit sales grew from 11 units in Q3 2020 to 21 units in Q3 2021, representing a massive growth of approximately 91% in sales in just a year. The sales also grew by 5 units from Q2 2021 to Q3 2021, marking a 31.3% growth in sales in the latest quarter. Overall, this type of technology had a 26.6% share in the unit sales in Q3 2021.

Extreme Ultraviolet

Extreme Ultraviolet or EUV helps to reduce the critical lithography masks and the number of steps which in turn helps to reduce defects, cost, and time cycle for the customers. This technology is the core for creating mobile as well as modern computer chips.

The unit sales increased by one unit in Q3 2021 when compared to Q3 2020, marking a 7% growth in sales in a year. The unit sales also grew by 6 units in Q3 2021, leading to a 66.7% quarterly growth in sales when compared to Q2 2021. This technology accounted for 19% of the total unit sales in Q3 2021.

I-line

This is also another type of lithography system. It is a light generated by mercury vapor lamps and is used for less critical layers with larger features.

The unit sales fell by 3 units from Q3 2020 to Q3 2021, marking a 30% fall in sales in a year. The sales also decreased from 9 units in Q2 2021 to 7 units in Q3 2021, marking a 22% fall in sales, on a quarterly basis. Overall, this type of technology had a 9% share in the Q3 2021 sales.

Argon Fluoride Dry

The total unit sales from Q3 2020 to Q3 2021 grew by 4 units, marking a commendable 200% growth in the unit sales in just a year. On the other hand, the unit sales fell by a unit in Q3 2021 when compared to Q2 2021, marking a fall of 14.3% on a quarterly basis. Overall, this technology had the least share of 7.6% in the Q3 2021 sales.

About ASML Holdings

ASML Holdings is a global leader in the chip industry. The company was incorporated in 1984 in Eindhoven as a joint venture between Philips and ASM International. Its trusted relationship with its customers is the key to its success. The company has become a global force through its continuous innovation and customer focus.

The company provides hardware as well as software services to the chipmakers to mass produce patterns on silicon, which in turn is done through lithography. The company’s innovative technology increases the value and reduces the cost of a chip. The company believes that the microchip industry can help advance us towards a smarter world and tackle challenges like climate change, mobility, and accessibility to nutrition and healthcare.

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